Characteristics of molybdenum thin-film plate oscillators fabricated by minimum deformation micromachining

Kenji Miyazaki, Noriyoshi Yamauchi, Tomoko Hisaki, Ryouichi Takahashi, Kiyoshi Itao

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)53-54
Number of pages2
JournalInternational Journal of the Japan Society for Precision Engineering
Volume31
Issue number1
Publication statusPublished - 1997 Mar 1
Externally publishedYes

Keywords

  • Fabrication
  • Micro actuator

ASJC Scopus subject areas

  • Engineering(all)

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