Characteristics of pure-shear mode BAW resonators consisting of (112̄0) textured ZnO films

Takahiko Yanagitani*, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science