Characteristics of Ti films for transition-edge sensor microcalorimeters

M. Ukibe, M. Koyanagi, M. Ohkubo, H. Pressler, Naoto Kobayashi

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We are developing X-ray microcalorimeters using superconducting transition-edge sensors (TESs), which can be operated at relatively high base temperatures of a 3He cryostat. For this purpose, we have selected Ti films to be used as TESs. The Ti films were deposited on different substrates by RF-sputtering. It was found that the superconducting properties of the Ti films depended on Ar pressure, film thickness, and substrate surface roughness.

Original languageEnglish
Pages (from-to)256-261
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume436
Issue number1-2
DOIs
Publication statusPublished - 1999 Oct 21
Externally publishedYes

Fingerprint

calorimeters
sensors
Sensors
Cryostats
cryostats
Substrates
Sputtering
Film thickness
surface roughness
film thickness
sputtering
Surface roughness
X rays
x rays
Temperature
temperature

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics

Cite this

Characteristics of Ti films for transition-edge sensor microcalorimeters. / Ukibe, M.; Koyanagi, M.; Ohkubo, M.; Pressler, H.; Kobayashi, Naoto.

In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 436, No. 1-2, 21.10.1999, p. 256-261.

Research output: Contribution to journalArticle

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