Characterization of (112̄0) textured ZnO films fabricated by RF magnetron sputtering

Takahiko Yanagitani, Shin Ichi Tomohiro, Takuya Nohara, Mami Matsukawa, Yoshiaki Watanabe, Takahiko Otani

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

Using a conventional RF magnetron sputtering system, we have obtained two types of ZnO films on various kinds of substrate. One is a film with the c-axes of crystallites unidirectionally aligned in the substrate plane {(112̄0) textured film}, The other is a film with c-axes parallel and perpendicular to the plane (mixed texture film). The former is expected to realize a shear wave transducer on the surfaces of various materials. The alignment of c-axes of crystallites in the plane was then carefully investigated by the X-ray pole figure analysis. The elastic anisotropy in the film has been successfully measured by the Brillouin scattering methcd. The (1120) textured film did not excite the elastic waves; however, comparatively strong shear waves were actually excited by the mixed texture film.

Original languageEnglish
Pages (from-to)3004-3007
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume43
Issue number5 B
Publication statusPublished - 2004 May
Externally publishedYes

Fingerprint

Magnetron sputtering
magnetron sputtering
Shear waves
Crystallites
crystallites
S waves
textures
Textures
Brillouin scattering
elastic anisotropy
Elastic waves
Substrates
elastic waves
Transducers
Poles
transducers
Anisotropy
poles
alignment
X rays

Keywords

  • (112̄0) textured ZnO film
  • Brillouin scattering method
  • Pole figure analysis
  • RF magnetron sputtering
  • Shear wave transducer

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Characterization of (112̄0) textured ZnO films fabricated by RF magnetron sputtering. / Yanagitani, Takahiko; Tomohiro, Shin Ichi; Nohara, Takuya; Matsukawa, Mami; Watanabe, Yoshiaki; Otani, Takahiko.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 5 B, 05.2004, p. 3004-3007.

Research output: Contribution to journalArticle

Yanagitani, Takahiko ; Tomohiro, Shin Ichi ; Nohara, Takuya ; Matsukawa, Mami ; Watanabe, Yoshiaki ; Otani, Takahiko. / Characterization of (112̄0) textured ZnO films fabricated by RF magnetron sputtering. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2004 ; Vol. 43, No. 5 B. pp. 3004-3007.
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