Abstract
Using a conventional RF magnetron sputtering system, we have obtained two types of ZnO films on various kinds of substrate. One is a film with the c-axes of crystallites unidirectionally aligned in the substrate plane {(112̄0) textured film}, The other is a film with c-axes parallel and perpendicular to the plane (mixed texture film). The former is expected to realize a shear wave transducer on the surfaces of various materials. The alignment of c-axes of crystallites in the plane was then carefully investigated by the X-ray pole figure analysis. The elastic anisotropy in the film has been successfully measured by the Brillouin scattering methcd. The (1120) textured film did not excite the elastic waves; however, comparatively strong shear waves were actually excited by the mixed texture film.
| Original language | English |
|---|---|
| Pages (from-to) | 3004-3007 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 43 |
| Issue number | 5 B |
| DOIs | |
| Publication status | Published - 2004 May |
| Externally published | Yes |
Keywords
- (112̄0) textured ZnO film
- Brillouin scattering method
- Pole figure analysis
- RF magnetron sputtering
- Shear wave transducer
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)