Characterization of a quartz MEMS tilt sensor with 0.001° precision

Jinxing Liang; Fusao Kohsaka; Xuefeng Li; Ken Kunitomo; Toshitsugu Ueda

doi:10.1109/SENSOR.2009.5285503

Characterization of a quartz MEMS tilt sensor with 0.001° precision

Jinxing Liang^*, Fusao Kohsaka, Xuefeng Li, Ken Kunitomo, Toshitsugu Ueda

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

This paper presents the performance of recently developed MEMS capacitive tilt sensor. The capacitive sensor, which can be considered as a static accelerometer, is fabricated using bulk micromachining technique on a 100-μm-thick z-cut quartz wafer. High-sensitivity and low-noise are achieved with stable output performance in the range of ±1°. The performance evaluation was performed at the 0.625 V excitation voltage and 9.1 Hz data update rate. The typical sensitivity with good linearity is 403.5 fF/°, which corresponds to 23.1 pF/g and the typical RMS noise is 74 aF, which corresponds to 25 aF/√Hz (0.9 μg/√Hz) noise floor. High-precision measurement of 0.001° has been demonstrated.

Original language	English
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	308-310
Number of pages	3
DOIs	https://doi.org/10.1109/SENSOR.2009.5285503
Publication status	Published - 2009
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO Duration: 2009 Jun 21 → 2009 Jun 25

Other

Other	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
City	Denver, CO
Period	09/6/21 → 09/6/25

Keywords

Capacitive
MEMS
Quartz
Tilt sensor

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2009.5285503

Cite this

Liang, J, Kohsaka, F, Li, X, Kunitomo, K & Ueda, T 2009, Characterization of a quartz MEMS tilt sensor with 0.001° precision. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285503, pp. 308-310, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285503

@inproceedings{36cc9591f6434210b0ada07b971fc484,

title = "Characterization of a quartz MEMS tilt sensor with 0.001° precision",

abstract = "This paper presents the performance of recently developed MEMS capacitive tilt sensor. The capacitive sensor, which can be considered as a static accelerometer, is fabricated using bulk micromachining technique on a 100-μm-thick z-cut quartz wafer. High-sensitivity and low-noise are achieved with stable output performance in the range of ±1°. The performance evaluation was performed at the 0.625 V excitation voltage and 9.1 Hz data update rate. The typical sensitivity with good linearity is 403.5 fF/°, which corresponds to 23.1 pF/g and the typical RMS noise is 74 aF, which corresponds to 25 aF/√Hz (0.9 μg/√Hz) noise floor. High-precision measurement of 0.001° has been demonstrated.",

keywords = "Capacitive, MEMS, Quartz, Tilt sensor",

author = "Jinxing Liang and Fusao Kohsaka and Xuefeng Li and Ken Kunitomo and Toshitsugu Ueda",

year = "2009",

doi = "10.1109/SENSOR.2009.5285503",

language = "English",

isbn = "9781424441938",

pages = "308--310",

booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",

}

TY - GEN

T1 - Characterization of a quartz MEMS tilt sensor with 0.001° precision

AU - Liang, Jinxing

AU - Kohsaka, Fusao

AU - Li, Xuefeng

AU - Kunitomo, Ken

AU - Ueda, Toshitsugu

PY - 2009

Y1 - 2009

N2 - This paper presents the performance of recently developed MEMS capacitive tilt sensor. The capacitive sensor, which can be considered as a static accelerometer, is fabricated using bulk micromachining technique on a 100-μm-thick z-cut quartz wafer. High-sensitivity and low-noise are achieved with stable output performance in the range of ±1°. The performance evaluation was performed at the 0.625 V excitation voltage and 9.1 Hz data update rate. The typical sensitivity with good linearity is 403.5 fF/°, which corresponds to 23.1 pF/g and the typical RMS noise is 74 aF, which corresponds to 25 aF/√Hz (0.9 μg/√Hz) noise floor. High-precision measurement of 0.001° has been demonstrated.

AB - This paper presents the performance of recently developed MEMS capacitive tilt sensor. The capacitive sensor, which can be considered as a static accelerometer, is fabricated using bulk micromachining technique on a 100-μm-thick z-cut quartz wafer. High-sensitivity and low-noise are achieved with stable output performance in the range of ±1°. The performance evaluation was performed at the 0.625 V excitation voltage and 9.1 Hz data update rate. The typical sensitivity with good linearity is 403.5 fF/°, which corresponds to 23.1 pF/g and the typical RMS noise is 74 aF, which corresponds to 25 aF/√Hz (0.9 μg/√Hz) noise floor. High-precision measurement of 0.001° has been demonstrated.

KW - Capacitive

KW - MEMS

KW - Quartz

KW - Tilt sensor

UR - http://www.scopus.com/inward/record.url?scp=71449125280&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=71449125280&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2009.5285503

DO - 10.1109/SENSOR.2009.5285503

M3 - Conference contribution

AN - SCOPUS:71449125280

SN - 9781424441938

SP - 308

EP - 310

BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 21 June 2009 through 25 June 2009

ER -

Characterization of a quartz MEMS tilt sensor with 0.001° precision

Abstract

Other

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this