CHARACTERIZATION OF DIAMOND PARTICLES AND FILMS FORMED BY PLASMA-ASSISTED CHEMICAL VAPOUR DEPOSITION USING HIGH-VOLTAGE ELECTRON MICROSCOPY.

Hiroshi Kawarada, King Sheng Mar, Jun ichi Suzuki, Toshimichi Ito, Hirotaro Mori, Hiroshi Fujita, Akio Hiraki

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The internal and internal structures of diamond particles and films on Si substrates formed by plasma-assisted chemical vapor deposition have been investigated by high-voltage transmission electron microscopy. The feature of line defects - micro-twin lamellae or stacking faults - in a diamond particle indicates the concentric crystal growth originated from one nucleus. The particles are observed to be in direct contact with the Si substrate around the nucleation site within the resolution limit. The particles are stacked up to form a diamond film.

Original languageEnglish
Title of host publicationJapanese Journal of Applied Physics, Part 2: Letters
Pages1904-1906
Number of pages3
Volume26
Edition11
Publication statusPublished - 1987 Nov
Externally publishedYes

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Electron microscopy
Chemical vapor deposition
Diamonds
Plasmas
Diamond films
Stacking faults
Electric potential
Substrates
Crystal growth
Nucleation
Transmission electron microscopy
Defects

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kawarada, H., Mar, K. S., Suzuki, J. I., Ito, T., Mori, H., Fujita, H., & Hiraki, A. (1987). CHARACTERIZATION OF DIAMOND PARTICLES AND FILMS FORMED BY PLASMA-ASSISTED CHEMICAL VAPOUR DEPOSITION USING HIGH-VOLTAGE ELECTRON MICROSCOPY. In Japanese Journal of Applied Physics, Part 2: Letters (11 ed., Vol. 26, pp. 1904-1906)

CHARACTERIZATION OF DIAMOND PARTICLES AND FILMS FORMED BY PLASMA-ASSISTED CHEMICAL VAPOUR DEPOSITION USING HIGH-VOLTAGE ELECTRON MICROSCOPY. / Kawarada, Hiroshi; Mar, King Sheng; Suzuki, Jun ichi; Ito, Toshimichi; Mori, Hirotaro; Fujita, Hiroshi; Hiraki, Akio.

Japanese Journal of Applied Physics, Part 2: Letters. Vol. 26 11. ed. 1987. p. 1904-1906.

Research output: Chapter in Book/Report/Conference proceedingChapter

Kawarada, H, Mar, KS, Suzuki, JI, Ito, T, Mori, H, Fujita, H & Hiraki, A 1987, CHARACTERIZATION OF DIAMOND PARTICLES AND FILMS FORMED BY PLASMA-ASSISTED CHEMICAL VAPOUR DEPOSITION USING HIGH-VOLTAGE ELECTRON MICROSCOPY. in Japanese Journal of Applied Physics, Part 2: Letters. 11 edn, vol. 26, pp. 1904-1906.
Kawarada H, Mar KS, Suzuki JI, Ito T, Mori H, Fujita H et al. CHARACTERIZATION OF DIAMOND PARTICLES AND FILMS FORMED BY PLASMA-ASSISTED CHEMICAL VAPOUR DEPOSITION USING HIGH-VOLTAGE ELECTRON MICROSCOPY. In Japanese Journal of Applied Physics, Part 2: Letters. 11 ed. Vol. 26. 1987. p. 1904-1906
Kawarada, Hiroshi ; Mar, King Sheng ; Suzuki, Jun ichi ; Ito, Toshimichi ; Mori, Hirotaro ; Fujita, Hiroshi ; Hiraki, Akio. / CHARACTERIZATION OF DIAMOND PARTICLES AND FILMS FORMED BY PLASMA-ASSISTED CHEMICAL VAPOUR DEPOSITION USING HIGH-VOLTAGE ELECTRON MICROSCOPY. Japanese Journal of Applied Physics, Part 2: Letters. Vol. 26 11. ed. 1987. pp. 1904-1906
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