Characterization of gas barrier silica coatings prepared from perhydropolysilazane films by vacuum ultraviolet irradiation

Yuta Kobayashi, Hirotaka Yokota, Yasushi Fuchita, Atsushi Takahashi, Yoshiyuki Sugahara

Research output: Contribution to journalArticle

4 Citations (Scopus)


Gas barrier silica coatings were prepared from perhydropolysilazane (PHPS) by vacuum ultraviolet (VUV) irradiation under several irradiation conditions to investigate the relationship between their water vapor transmission rate (WVTR) and the irradiation conditions. PET substrates were coated with PHPS using its xylene solution, and the coatings were irradiated with VUV light (172 nm). The oxygen concentrations and irradiation distances were varied. The sample irradiated under conditions of lower oxygen concentration (less than 5%) and shorter irradiation distance (2.6mm) showed the lowest WVTR (0.721 g m 2 d-1). The sample irradiated under conditions of higher oxygen concentration (19%) and longer irradiation distance (13.4 mm), on the other hand, showed the highest WVTR (2.738g m2 d-1). These results suggest that VUV irradiation improves the gas barrier properties by Si-N bond cleavage rather than by oxidative reactions caused by O(1D) and O3.

Original languageEnglish
Pages (from-to)215-218
Number of pages4
JournalJournal of the Ceramic Society of Japan
Issue number1410
Publication statusPublished - 2013 Feb



  • Gas barrier properties
  • Perhydropolysilazane
  • Silica coating
  • Vacuum ultraviolet light
  • Water vapor transmission rate

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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