Characterizing atomic force microscopy tip shape in use

Hiroshi Itoh, Chunmei Wang, Jielin Sun, Jun Hu, Dianhong Shen, Shingo Ichimura

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

A new tip characterizer based on the fabrication of multilayer thin films for atomic force microscopy (AFM) was developed to analyze the effective tip shape while in use. The precise structure of this tip characterizer was measured by transmission electron microscopy. Four different types of commercial tips with various radii were characterized by the tip characterizer and by conventional scanning electron microscopy (SEM). The results were compared to obtain a relationship between the actual and effective tip shapes. A quantitative analysis was performed of apex radii measured from line profiles of comb-shaped patterns and nanometer-scale knife-edges without the problem of edge uncertainty in the SEM image. Degradation of the AFM tip induced by electron-beam irradiation was studied by using SEM and the tip characterizer. A potential technique for fabricating symmetric AFM tips based on irradiation by an electron beam and a quantitative analysis of changing the tip apex in SEM were examined with AFM using the tip characterizer.

Original languageEnglish
Pages (from-to)803-808
Number of pages6
JournalJournal of Nanoscience and Nanotechnology
Volume9
Issue number2
DOIs
Publication statusPublished - 2009 Feb 1
Externally publishedYes

Fingerprint

Atomic Force Microscopy
Electron Scanning Microscopy
Atomic force microscopy
atomic force microscopy
Scanning electron microscopy
Electron beams
Irradiation
Electrons
Comb and Wattles
Multilayer films
Chemical analysis
Transmission Electron Microscopy
Uncertainty
scanning electron microscopy
Transmission electron microscopy
quantitative analysis
Fabrication
Degradation
Thin films
apexes

Keywords

  • AFM
  • Cantilever
  • SEM
  • Superlattice
  • Tip characterizer

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering
  • Biomedical Engineering

Cite this

Characterizing atomic force microscopy tip shape in use. / Itoh, Hiroshi; Wang, Chunmei; Sun, Jielin; Hu, Jun; Shen, Dianhong; Ichimura, Shingo.

In: Journal of Nanoscience and Nanotechnology, Vol. 9, No. 2, 01.02.2009, p. 803-808.

Research output: Contribution to journalArticle

Itoh, Hiroshi ; Wang, Chunmei ; Sun, Jielin ; Hu, Jun ; Shen, Dianhong ; Ichimura, Shingo. / Characterizing atomic force microscopy tip shape in use. In: Journal of Nanoscience and Nanotechnology. 2009 ; Vol. 9, No. 2. pp. 803-808.
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