Chemical short-range order in ion-beam-induced amorphous SiC

Irradiation temperature dependence

Manabu Ishimaru, In Tae Bae, Akihiko Hirata, Yoshihiko Hirotsu, James A. Valdez, Kurt E. Sickafus

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Chemical short-range order of ion-beam-induced amorphous SiC (a-SiC) has been examined by transmission electron microscopy in combination with imaging plate techniques. Single crystals of 6H-SiC were irradiated with 300 keV xenon ions to a fluence of 1015 cm-2 at cryogenic and elevated temperatures. Atomic pair-distribution functions showed that not only heteronuclear (Si-C) bonds but also homonuclear (Si-Si and C-C) bonds exist within the first coordination shell of a-SiC networks. It was found that chemical short-range order of a-SiC depends on the ion irradiation conditions: the amorphous networks became more chemically disorder with decreasing the irradiation temperature.

Original languageEnglish
Pages (from-to)473-475
Number of pages3
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume242
Issue number1-2
DOIs
Publication statusPublished - 2006 Jan 1
Externally publishedYes

Fingerprint

Ion beams
ion beams
Irradiation
temperature dependence
irradiation
cryogenic temperature
ion irradiation
xenon
fluence
distribution functions
disorders
Temperature
transmission electron microscopy
Xenon
temperature
single crystals
Ion bombardment
Cryogenics
Distribution functions
ions

Keywords

  • Amorphous structure
  • Atomic pair-distribution function
  • Silicon carbide
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Chemical short-range order in ion-beam-induced amorphous SiC : Irradiation temperature dependence. / Ishimaru, Manabu; Bae, In Tae; Hirata, Akihiko; Hirotsu, Yoshihiko; Valdez, James A.; Sickafus, Kurt E.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 242, No. 1-2, 01.01.2006, p. 473-475.

Research output: Contribution to journalArticle

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