Chemical short-range order in ion-beam-induced amorphous SiC: Irradiation temperature dependence

Manabu Ishimaru; In Tae Bae; Akihiko Hirata; Yoshihiko Hirotsu; James A. Valdez; Kurt E. Sickafus

doi:10.1016/j.nimb.2005.08.066

Chemical short-range order in ion-beam-induced amorphous SiC: Irradiation temperature dependence

Manabu Ishimaru, In Tae Bae, Akihiko Hirata, Yoshihiko Hirotsu, James A. Valdez, Kurt E. Sickafus

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Chemical short-range order of ion-beam-induced amorphous SiC (a-SiC) has been examined by transmission electron microscopy in combination with imaging plate techniques. Single crystals of 6H-SiC were irradiated with 300 keV xenon ions to a fluence of 10¹⁵ cm^-2 at cryogenic and elevated temperatures. Atomic pair-distribution functions showed that not only heteronuclear (Si-C) bonds but also homonuclear (Si-Si and C-C) bonds exist within the first coordination shell of a-SiC networks. It was found that chemical short-range order of a-SiC depends on the ion irradiation conditions: the amorphous networks became more chemically disorder with decreasing the irradiation temperature.

Original language	English
Pages (from-to)	473-475
Number of pages	3
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	242
Issue number	1-2
DOIs	https://doi.org/10.1016/j.nimb.2005.08.066
Publication status	Published - 2006 Jan 1
Externally published	Yes

Keywords

Amorphous structure
Atomic pair-distribution function
Silicon carbide
Transmission electron microscopy

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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Chemical short-range order in ion-beam-induced amorphous SiC : Irradiation temperature dependence. / Ishimaru, Manabu; Bae, In Tae; Hirata, Akihiko; Hirotsu, Yoshihiko; Valdez, James A.; Sickafus, Kurt E.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 242, No. 1-2, 01.01.2006, p. 473-475.

Research output: Contribution to journal › Article › peer-review

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AU - Ishimaru, Manabu

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AU - Hirotsu, Yoshihiko

AU - Valdez, James A.

AU - Sickafus, Kurt E.

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