CMOS-embedded high-power handling RF-MEMS tunable capacitor using quadruple series capacitor and slit with dielectric bridges structure

Hiroaki Yamazaki, Yoshihiko Kurui, Tomohiro Saito, Etsuji Ogawa, Kei Obara, Ryunosuke Gando, Daiki Ono, Tamio Ikehashi

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Physics & Astronomy

Engineering & Materials Science