Coimplantation effects of (C and Si)/Ga in 6H-SiC

Y. Tanaka, Naoto Kobayashi, M. Hasegawa, M. Ogura, Y. Ishida, S. Yoshida, H. Okumura, H. Tanoue

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)

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Chemical Compounds

Engineering & Materials Science