Compact slanted comb two-axis micro-mirror scanner fabricated by silicon-on-insulator micromachining

Hoang Manh Chu, Jun Mizuno, Kazuhiro Hane, Toshiyuki Takagi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We present a two-axis micro-mirror scanner with compact slanted comb-drive actuator. The slanted comb-drive actuator is analyzed by comparing with a rectangular comb-drive actuator. The angle magnification factor of slanted comb-drive actuator is 1.6 times larger than that of rectangular comb-drive actuator. The slanted comb-drive actuator is designed for operations in both static and dynamic modes. The proposed scanner is realized from silicon-on-insulator (SOI) wafer. Electronic isolation between movable comb electrodes in device layer and fixed comb electrodes in handle layer are performed using isolation trenches, buried oxide layer, and silicon V-shaped conductive hinges. Movable and fixed parts are physically connected via buried oxide layer and silicon frame fabricated from the handle layer of SOI wafer using time-controlled etching process. The resonant frequencies of horizontal and vertical axes are 25.88 kHz and 592 Hz, respectively. The rotation angles are 0.7° and 5.8° at 80V dc voltage in the static mode for inner mirror and gimbal frame, respectively, and 21° and 24° using the differential ac driving method with 80 Vbias +70 Vac and 25 V bias +12.5 Vac voltages.

Original languageEnglish
Article number042001
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume29
Issue number4
DOIs
Publication statusPublished - 2011
Externally publishedYes

Fingerprint

Micromachining
Silicon
micromachining
scanners
Mirrors
Actuators
actuators
insulators
mirrors
silicon
Oxides
isolation
wafers
gimbals
Electrodes
electrodes
oxides
hinges
Electric potential
electric potential

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Compact slanted comb two-axis micro-mirror scanner fabricated by silicon-on-insulator micromachining. / Chu, Hoang Manh; Mizuno, Jun; Hane, Kazuhiro; Takagi, Toshiyuki.

In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 29, No. 4, 042001, 2011.

Research output: Contribution to journalArticle

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