Abstract
The oxidation of Si(111) and Si(100) surfaces with the high-purity ozone (more than 98 mole %) was investigated with X-ray photoelectron spectroscopy (XPS). Thin oxide less than 3 nm thickens was formed in an experimental chamber and the results showed that ozone oxidizes the (111) surface faster than (100) surface. Ozone does not show the temperature dependence on oxidation within the temperature range of 250-500 degree C for both (111) and (100) surfaces. Ozone proceeds the oxide formation at 700 degree C where oxygen does not proceed oxide formation rapidly.
| Original language | English |
|---|---|
| Pages (from-to) | 359-364 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 477 |
| Publication status | Published - 1997 Jan 1 |
| Externally published | Yes |
| Event | Proceedings of the 1997 MRS Spring Meeting - San Francisco, CA, USA Duration: 1997 Mar 31 → 1997 Apr 3 |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering