Comparison of initial oxidation of Si(111)7×7 with ozone and oxygen investigated by second harmonic generation

Ken Nakamura, Akira Kurokawa, Shingo Ichimura

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

Initial oxidation by high purity ozone and molecular oxygen of Si(111)7×7 was investigated by second harmonic generation (SHG) with a 1.064 μm Nd:YAG laser. Decrease of second harmonics (SH) intensity to almost zero after 5 L ozone gas exposure, in spite of the fact that molecular oxygen kept SH intensity for the same amount of exposure, indicated that ozone is inserted into the Si-Si backbond in the subsurface layers more effectively than molecular oxygen. In the initial exposure, rates of rapid decrease in SH intensity for both ozone and oxygen adsorption were in the same order of magnitude, although O 1s x-ray photoelectron spectroscopy (XPS) intensity showed high reactivity of ozone. This is because of a difference in the information depth between SHG and XPS so that oxygen species in the subsurface layers are not effective in decreasing SH intensity. This indicates that the process of attacking backbonds is underway even with an initial exposure of <5 L.

Original languageEnglish
Pages (from-to)2441-2445
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume15
Issue number4
DOIs
Publication statusPublished - 1997 Jan 1
Externally publishedYes

Fingerprint

Ozone
Harmonic generation
ozone
harmonic generations
Molecular oxygen
Oxygen
Oxidation
oxidation
oxygen
harmonics
Photoelectron spectroscopy
x ray spectroscopy
photoelectron spectroscopy
X rays
YAG lasers
purity
reactivity
Gases
Adsorption
adsorption

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Comparison of initial oxidation of Si(111)7×7 with ozone and oxygen investigated by second harmonic generation. / Nakamura, Ken; Kurokawa, Akira; Ichimura, Shingo.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 15, No. 4, 01.01.1997, p. 2441-2445.

Research output: Contribution to journalArticle

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