The PO-determining mechanism of reactive-sputter-deposited TiN, AlN, and TaN was studied. Both the existing experimental results for these three materials and the existing models explaining preferred orientation were experimentally studied. The resultant data were analyzed in detail.
|Number of pages||12|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 2003 Nov|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films