Computer calculation of phase diagrams of Si-N-Cl-H, Si-C-Cl-H, and Al-N-Cl-H systems for syntheses of Si3N4, SiC and AlN

Akio Fuwa, Yutaka Shimizu, Toshiyasu Ohasi, Tadashi Kobayashi

    Research output: Contribution to journalArticle

    2 Citations (Scopus)

    Abstract

    Using the SOLGAS-MIX computer program and the JANAF thermochemical data, the equilibrium phase diagrams of Si-N-Cl-H, Si-C-Cl-H and Al-N-Cl-H systems at 1473 K and 1 atmosphere have been constructed for syntheses of Si3N4, SiC and AlN. Based on these phase diagrams, the selection and the combination of the gaseous reactant chemicals have been discussed as well as the synthesis yields and total free energy change in these syntheses formation reactions. Desirable condition for these compound syntheses could be shown under equilibrium condition by the computer calculation using these phase diagram and the thermochemical data.

    Original languageEnglish
    Pages (from-to)62-76
    Number of pages15
    JournalMetallurgical Review of MMIJ (Mining and Metallurgical Institute of Japan)
    Volume6
    Issue number1
    Publication statusPublished - 1989 Apr

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    Phase diagrams
    Free energy
    Computer program listings
    silicon nitride

    ASJC Scopus subject areas

    • Metals and Alloys

    Cite this

    Computer calculation of phase diagrams of Si-N-Cl-H, Si-C-Cl-H, and Al-N-Cl-H systems for syntheses of Si3N4, SiC and AlN. / Fuwa, Akio; Shimizu, Yutaka; Ohasi, Toshiyasu; Kobayashi, Tadashi.

    In: Metallurgical Review of MMIJ (Mining and Metallurgical Institute of Japan), Vol. 6, No. 1, 04.1989, p. 62-76.

    Research output: Contribution to journalArticle

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