Computer calculation of phase diagrams of Si-N-Cl-H, Si-C-Cl-H, and Al-N-Cl-H systems for synthesis of Si3N4, SiC and AIN

Akio Fuwa, Yutaka Shimizu, Toshiyasu Ohasi, Tadashi Kobayashi

    Research output: Contribution to journalArticle


    Using the SOLGAS-MIX computer program and JANAF thermochemical data, the equilibrium phase diagrams of Si-N-Cl-H, Si-C-Cl-H and Al-N-Cl-H systems at 1473 K and 1 atmosphere have been constructed for synthesis of Si3N4, SiC and AlN. Based on these phase diagrams, selection and combination of gaseous reactant chemicals are discussed with respect to the synthesis yields and total free energy change in the formation reactions. Desirable conditions for synthesis are shown under equilibrium conditions.

    Original languageEnglish
    Pages (from-to)195-200
    Number of pages6
    JournalShigen to sozai
    Issue number2
    Publication statusPublished - 1989 Feb


    ASJC Scopus subject areas

    • Engineering(all)

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