Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen

Kwang Soo Seol, Tsuyoshi Futami, Yoshimichi Ohki

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    Abstract

    Using synchrotron radiation as a photon source, photoluminescence spectra were obtained for buried oxide formed by implantation of oxygen. From the spectra, the oxide was known to have relaxed and unrelaxed neutral oxygen vacancies with respective concentrations of 1.4×1020 and 1.0×1017 cm-3.

    Original languageEnglish
    Pages (from-to)2357-2359
    Number of pages3
    JournalJournal of Applied Physics
    Volume83
    Issue number4
    Publication statusPublished - 1998 Feb 15

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    ASJC Scopus subject areas

    • Physics and Astronomy(all)
    • Physics and Astronomy (miscellaneous)

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