Using synchrotron radiation as a photon source, photoluminescence spectra were obtained for buried oxide formed by implantation of oxygen. From the spectra, the oxide was known to have relaxed and unrelaxed neutral oxygen vacancies with respective concentrations of 1.4×1020 and 1.0×1017 cm-3.
|Number of pages||3|
|Journal||Journal of Applied Physics|
|Publication status||Published - 1998 Feb 15|
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Physics and Astronomy (miscellaneous)