Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen

Kwang Soo Seol, Tsuyoshi Futami, Yoshimichi Ohki

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Using synchrotron radiation as a photon source, photoluminescence spectra were obtained for buried oxide formed by implantation of oxygen. From the spectra, the oxide was known to have relaxed and unrelaxed neutral oxygen vacancies with respective concentrations of 1.4×1020 and 1.0×1017 cm-3.

Original languageEnglish
Pages (from-to)2357-2359
Number of pages3
JournalJournal of Applied Physics
Volume83
Issue number4
DOIs
Publication statusPublished - 1998 Feb 15

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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