Construction of membrane sieves using stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 multilayer films and their applications in blood plasma separation

Dae Sik Lee, Yo Han Choi, Yong Duk Han, Hyun C. Yoon, Shuichi Shoji, Mun Youn Jung

    Research output: Contribution to journalArticle

    15 Citations (Scopus)

    Abstract

    The novelty of this study resides in the fabrication of stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 triplelayer membrane sieves. The membrane sieves were designed to be very flat and thin, mechanically stressreduced, and stable in their electrical and chemical properties. All insulating materials are deposited stoichiometrically by a low-pressure chemical vapor deposition system. The membranes with a thickness of 0.4 μm have pores with a diameter of about 1 μm. The device is fabricated on a 6" silicon wafer with the semiconductor processes. We utilized the membrane sieves for plasma separations from human whole blood. To enhance the separation ability of blood plasma, an agarose gel matrix was attached to the membrane sieves. We could separate about 1 μL of blood plasma from 5 μL of human whole blood. Our device can be used in the cell-based biosensors or analysis systems in analytical chemistry.

    Original languageEnglish
    Pages (from-to)226-234
    Number of pages9
    JournalETRI Journal
    Volume34
    Issue number2
    DOIs
    Publication statusPublished - 2012 Apr

    Fingerprint

    Sieves
    Multilayer films
    Blood
    Membranes
    Plasmas
    Low pressure chemical vapor deposition
    Insulating materials
    Silicon wafers
    Biosensors
    Sepharose
    Chemical properties
    Electric properties
    Gels
    Semiconductor materials
    Fabrication
    Chemical analysis

    Keywords

    • Membrane sieves
    • Plasma separation
    • Si N /SiO /Si N
    • Stoichiometric

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Computer Science(all)
    • Electronic, Optical and Magnetic Materials

    Cite this

    Construction of membrane sieves using stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 multilayer films and their applications in blood plasma separation. / Lee, Dae Sik; Choi, Yo Han; Han, Yong Duk; Yoon, Hyun C.; Shoji, Shuichi; Jung, Mun Youn.

    In: ETRI Journal, Vol. 34, No. 2, 04.2012, p. 226-234.

    Research output: Contribution to journalArticle

    @article{f7863a4fd59849a2967903afaaf736bd,
    title = "Construction of membrane sieves using stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 multilayer films and their applications in blood plasma separation",
    abstract = "The novelty of this study resides in the fabrication of stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 triplelayer membrane sieves. The membrane sieves were designed to be very flat and thin, mechanically stressreduced, and stable in their electrical and chemical properties. All insulating materials are deposited stoichiometrically by a low-pressure chemical vapor deposition system. The membranes with a thickness of 0.4 μm have pores with a diameter of about 1 μm. The device is fabricated on a 6{"} silicon wafer with the semiconductor processes. We utilized the membrane sieves for plasma separations from human whole blood. To enhance the separation ability of blood plasma, an agarose gel matrix was attached to the membrane sieves. We could separate about 1 μL of blood plasma from 5 μL of human whole blood. Our device can be used in the cell-based biosensors or analysis systems in analytical chemistry.",
    keywords = "Membrane sieves, Plasma separation, Si N /SiO /Si N, Stoichiometric",
    author = "Lee, {Dae Sik} and Choi, {Yo Han} and Han, {Yong Duk} and Yoon, {Hyun C.} and Shuichi Shoji and Jung, {Mun Youn}",
    year = "2012",
    month = "4",
    doi = "10.4218/etrij.12.1711.0013",
    language = "English",
    volume = "34",
    pages = "226--234",
    journal = "ETRI Journal",
    issn = "1225-6463",
    publisher = "ETRI",
    number = "2",

    }

    TY - JOUR

    T1 - Construction of membrane sieves using stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 multilayer films and their applications in blood plasma separation

    AU - Lee, Dae Sik

    AU - Choi, Yo Han

    AU - Han, Yong Duk

    AU - Yoon, Hyun C.

    AU - Shoji, Shuichi

    AU - Jung, Mun Youn

    PY - 2012/4

    Y1 - 2012/4

    N2 - The novelty of this study resides in the fabrication of stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 triplelayer membrane sieves. The membrane sieves were designed to be very flat and thin, mechanically stressreduced, and stable in their electrical and chemical properties. All insulating materials are deposited stoichiometrically by a low-pressure chemical vapor deposition system. The membranes with a thickness of 0.4 μm have pores with a diameter of about 1 μm. The device is fabricated on a 6" silicon wafer with the semiconductor processes. We utilized the membrane sieves for plasma separations from human whole blood. To enhance the separation ability of blood plasma, an agarose gel matrix was attached to the membrane sieves. We could separate about 1 μL of blood plasma from 5 μL of human whole blood. Our device can be used in the cell-based biosensors or analysis systems in analytical chemistry.

    AB - The novelty of this study resides in the fabrication of stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 triplelayer membrane sieves. The membrane sieves were designed to be very flat and thin, mechanically stressreduced, and stable in their electrical and chemical properties. All insulating materials are deposited stoichiometrically by a low-pressure chemical vapor deposition system. The membranes with a thickness of 0.4 μm have pores with a diameter of about 1 μm. The device is fabricated on a 6" silicon wafer with the semiconductor processes. We utilized the membrane sieves for plasma separations from human whole blood. To enhance the separation ability of blood plasma, an agarose gel matrix was attached to the membrane sieves. We could separate about 1 μL of blood plasma from 5 μL of human whole blood. Our device can be used in the cell-based biosensors or analysis systems in analytical chemistry.

    KW - Membrane sieves

    KW - Plasma separation

    KW - Si N /SiO /Si N

    KW - Stoichiometric

    UR - http://www.scopus.com/inward/record.url?scp=84860171777&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84860171777&partnerID=8YFLogxK

    U2 - 10.4218/etrij.12.1711.0013

    DO - 10.4218/etrij.12.1711.0013

    M3 - Article

    AN - SCOPUS:84860171777

    VL - 34

    SP - 226

    EP - 234

    JO - ETRI Journal

    JF - ETRI Journal

    SN - 1225-6463

    IS - 2

    ER -