Construction of membrane sieves using stoichiometric and stress-reduced Si 3N 4/SiO 2/Si 3N 4 multilayer films and their applications in blood plasma separation

Dae Sik Lee*, Yo Han Choi, Yong Duk Han, Hyun C. Yoon, Shuichi Shoji, Mun Youn Jung

*Corresponding author for this work

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15 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds