Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure

D. H. Yoon, T. Sekiguchi, J. S. Go, S. Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper proposes a high accuracy fabrication method for multilayer PDMS (polydimethylsiloxane) devices. Based on newly developed multi-stacking process using three-dimensional (3D) alignment marks of the concave-convex pair structures, a multilayer PDMS device was fabricated without skillful handling for alignment. Total misalignment of smaller than 10 μm is achieved for fabrication of a five-layer PDMS device. The precisely aligned multilayer structure was applied to a novel type of particle separation. By 3D secondary rotation flow in the 3D fluidic microchannel, two types of microparticles of 10 μm and 20 μm in diameter were successfully separated with high throughput.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages1025-1028
Number of pages4
DOIs
Publication statusPublished - 2012 May 7
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 2012 Jan 292012 Feb 2

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period12/1/2912/2/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure'. Together they form a unique fingerprint.

  • Cite this

    Yoon, D. H., Sekiguchi, T., Go, J. S., & Shoji, S. (2012). Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1025-1028). [6170189] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170189