Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper proposes a high accuracy fabrication method for multilayer PDMS (polydimethylsiloxane) devices. Based on newly developed multi-stacking process using three-dimensional (3D) alignment marks of the concave-convex pair structures, a multilayer PDMS device was fabricated without skillful handling for alignment. Total misalignment of smaller than 10 μm is achieved for fabrication of a five-layer PDMS device. The precisely aligned multilayer structure was applied to a novel type of particle separation. By 3D secondary rotation flow in the 3D fluidic microchannel, two types of microparticles of 10 μm and 20 μm in diameter were successfully separated with high throughput.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages1025-1028
Number of pages4
DOIs
Publication statusPublished - 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris
Duration: 2012 Jan 292012 Feb 2

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CityParis
Period12/1/2912/2/2

Fingerprint

three dimensional flow
Polydimethylsiloxane
laminates
Multilayers
alignment
Fabrication
fabrication
fluidics
Fluidics
microparticles
microchannels
Microchannels
misalignment
Throughput
baysilon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Yoon, D., Sekiguchi, T., Go, J. S., & Shoji, S. (2012). Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 1025-1028). [6170189] https://doi.org/10.1109/MEMSYS.2012.6170189

Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. / Yoon, Donghyun; Sekiguchi, Tetsushi; Go, J. S.; Shoji, Shuichi.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2012. p. 1025-1028 6170189.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yoon, D, Sekiguchi, T, Go, JS & Shoji, S 2012, Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 6170189, pp. 1025-1028, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170189
Yoon D, Sekiguchi T, Go JS, Shoji S. Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2012. p. 1025-1028. 6170189 https://doi.org/10.1109/MEMSYS.2012.6170189
Yoon, Donghyun ; Sekiguchi, Tetsushi ; Go, J. S. ; Shoji, Shuichi. / Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2012. pp. 1025-1028
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