Contribution of metal layer thickness for quantitative backscattered electron imaging of field emission scanning electron microscopy

Hyonchol Kim, Hiroyuki Takei, Tsutomu Negishi, Masato Kudo, Hideyuki Terazono, Kenji Yasuda

Research output: Contribution to journalArticle

Abstract

The contributions of metal thickness and the diameter of metal shell particles to quantitative backscattered electron (BSE) imaging in field emission scanning electron microscopy (FE-SEM) were studied to evaluate the potential of using these particles as simultaneously distinguishable labels of target molecules in FE-SEM studies. Gold spherical shells were fabricated with 200 or 300 nm diameter and 5, 10, 15 or 20 nm Au shell thickness, placed on silicon substrates, respectively, and observed in BSE imaging mode by FE-SEM. Flat Au films of the same thicknesses were formed on a Si substrate to evaluate the contribution of shell diameter to BSE imaging. The relationship between relative BSE intensity, which was calculated by setting the intensities of the Si substrate and 20 nm-thick Au layer as standards, and Au layer thickness was studied for all samples. With increasing Au layer thickness, BSE intensity also proportionally increased for all samples (R 2 > 0.93) in the range of these thicknesses. Gradients of the increase were 1.5 times different between the flat film and metal shells, which was caused by the presence of voids in shell particles. The difference in gradients for increasing shell thickness between 200 and 300 nm particles was 15%. This result indicated that 1.5 times difference in shell diameter contributed to the increase of BSE intensity against the increase of shell thicknesses as a 15% error, and strict control of both metal shell diameter and thickness in the fabrication process is essential when using these shells as labels of BSE measurements in FE-SEM.

Original languageEnglish
Pages (from-to)301-304
Number of pages4
Journale-Journal of Surface Science and Nanotechnology
Volume10
DOIs
Publication statusPublished - 2012 Jun 30
Externally publishedYes

Fingerprint

Field emission
Electron Scanning Microscopy
field emission
Metals
Electrons
Imaging techniques
Scanning electron microscopy
scanning electron microscopy
metal shells
metals
electron flux density
electrons
Labels
Substrates
Silicon
gradients
Gold
spherical shells
voids
Fabrication

Keywords

  • Adaptive SEM technology
  • Biological label
  • Diffraction
  • Electron-solid interactions
  • Metal nano-cup
  • Nano-films
  • Nano-particles
  • Quantum dots and supra-molecules
  • Reflection electron microscopy (REM)
  • Scanning electron microscopy (SEM)
  • Scattering
  • Stacks and other nano materials

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Mechanics of Materials
  • Biotechnology
  • Bioengineering

Cite this

Contribution of metal layer thickness for quantitative backscattered electron imaging of field emission scanning electron microscopy. / Kim, Hyonchol; Takei, Hiroyuki; Negishi, Tsutomu; Kudo, Masato; Terazono, Hideyuki; Yasuda, Kenji.

In: e-Journal of Surface Science and Nanotechnology, Vol. 10, 30.06.2012, p. 301-304.

Research output: Contribution to journalArticle

@article{68b84fa80ba54f88927c16c0d07b37b7,
title = "Contribution of metal layer thickness for quantitative backscattered electron imaging of field emission scanning electron microscopy",
abstract = "The contributions of metal thickness and the diameter of metal shell particles to quantitative backscattered electron (BSE) imaging in field emission scanning electron microscopy (FE-SEM) were studied to evaluate the potential of using these particles as simultaneously distinguishable labels of target molecules in FE-SEM studies. Gold spherical shells were fabricated with 200 or 300 nm diameter and 5, 10, 15 or 20 nm Au shell thickness, placed on silicon substrates, respectively, and observed in BSE imaging mode by FE-SEM. Flat Au films of the same thicknesses were formed on a Si substrate to evaluate the contribution of shell diameter to BSE imaging. The relationship between relative BSE intensity, which was calculated by setting the intensities of the Si substrate and 20 nm-thick Au layer as standards, and Au layer thickness was studied for all samples. With increasing Au layer thickness, BSE intensity also proportionally increased for all samples (R 2 > 0.93) in the range of these thicknesses. Gradients of the increase were 1.5 times different between the flat film and metal shells, which was caused by the presence of voids in shell particles. The difference in gradients for increasing shell thickness between 200 and 300 nm particles was 15{\%}. This result indicated that 1.5 times difference in shell diameter contributed to the increase of BSE intensity against the increase of shell thicknesses as a 15{\%} error, and strict control of both metal shell diameter and thickness in the fabrication process is essential when using these shells as labels of BSE measurements in FE-SEM.",
keywords = "Adaptive SEM technology, Biological label, Diffraction, Electron-solid interactions, Metal nano-cup, Nano-films, Nano-particles, Quantum dots and supra-molecules, Reflection electron microscopy (REM), Scanning electron microscopy (SEM), Scattering, Stacks and other nano materials",
author = "Hyonchol Kim and Hiroyuki Takei and Tsutomu Negishi and Masato Kudo and Hideyuki Terazono and Kenji Yasuda",
year = "2012",
month = "6",
day = "30",
doi = "10.1380/ejssnt.2012.301",
language = "English",
volume = "10",
pages = "301--304",
journal = "e-Journal of Surface Science and Nanotechnology",
issn = "1348-0391",
publisher = "Surface Science Society of Japan",

}

TY - JOUR

T1 - Contribution of metal layer thickness for quantitative backscattered electron imaging of field emission scanning electron microscopy

AU - Kim, Hyonchol

AU - Takei, Hiroyuki

AU - Negishi, Tsutomu

AU - Kudo, Masato

AU - Terazono, Hideyuki

AU - Yasuda, Kenji

PY - 2012/6/30

Y1 - 2012/6/30

N2 - The contributions of metal thickness and the diameter of metal shell particles to quantitative backscattered electron (BSE) imaging in field emission scanning electron microscopy (FE-SEM) were studied to evaluate the potential of using these particles as simultaneously distinguishable labels of target molecules in FE-SEM studies. Gold spherical shells were fabricated with 200 or 300 nm diameter and 5, 10, 15 or 20 nm Au shell thickness, placed on silicon substrates, respectively, and observed in BSE imaging mode by FE-SEM. Flat Au films of the same thicknesses were formed on a Si substrate to evaluate the contribution of shell diameter to BSE imaging. The relationship between relative BSE intensity, which was calculated by setting the intensities of the Si substrate and 20 nm-thick Au layer as standards, and Au layer thickness was studied for all samples. With increasing Au layer thickness, BSE intensity also proportionally increased for all samples (R 2 > 0.93) in the range of these thicknesses. Gradients of the increase were 1.5 times different between the flat film and metal shells, which was caused by the presence of voids in shell particles. The difference in gradients for increasing shell thickness between 200 and 300 nm particles was 15%. This result indicated that 1.5 times difference in shell diameter contributed to the increase of BSE intensity against the increase of shell thicknesses as a 15% error, and strict control of both metal shell diameter and thickness in the fabrication process is essential when using these shells as labels of BSE measurements in FE-SEM.

AB - The contributions of metal thickness and the diameter of metal shell particles to quantitative backscattered electron (BSE) imaging in field emission scanning electron microscopy (FE-SEM) were studied to evaluate the potential of using these particles as simultaneously distinguishable labels of target molecules in FE-SEM studies. Gold spherical shells were fabricated with 200 or 300 nm diameter and 5, 10, 15 or 20 nm Au shell thickness, placed on silicon substrates, respectively, and observed in BSE imaging mode by FE-SEM. Flat Au films of the same thicknesses were formed on a Si substrate to evaluate the contribution of shell diameter to BSE imaging. The relationship between relative BSE intensity, which was calculated by setting the intensities of the Si substrate and 20 nm-thick Au layer as standards, and Au layer thickness was studied for all samples. With increasing Au layer thickness, BSE intensity also proportionally increased for all samples (R 2 > 0.93) in the range of these thicknesses. Gradients of the increase were 1.5 times different between the flat film and metal shells, which was caused by the presence of voids in shell particles. The difference in gradients for increasing shell thickness between 200 and 300 nm particles was 15%. This result indicated that 1.5 times difference in shell diameter contributed to the increase of BSE intensity against the increase of shell thicknesses as a 15% error, and strict control of both metal shell diameter and thickness in the fabrication process is essential when using these shells as labels of BSE measurements in FE-SEM.

KW - Adaptive SEM technology

KW - Biological label

KW - Diffraction

KW - Electron-solid interactions

KW - Metal nano-cup

KW - Nano-films

KW - Nano-particles

KW - Quantum dots and supra-molecules

KW - Reflection electron microscopy (REM)

KW - Scanning electron microscopy (SEM)

KW - Scattering

KW - Stacks and other nano materials

UR - http://www.scopus.com/inward/record.url?scp=84863671259&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84863671259&partnerID=8YFLogxK

U2 - 10.1380/ejssnt.2012.301

DO - 10.1380/ejssnt.2012.301

M3 - Article

VL - 10

SP - 301

EP - 304

JO - e-Journal of Surface Science and Nanotechnology

JF - e-Journal of Surface Science and Nanotechnology

SN - 1348-0391

ER -