Abstract
Since micro manipulation is necessary for handling micro order small objects, actuators suitable for a micro manipulator have long been studied. Unlike the conventional actuators, this paper proposes a new electro static actuator with three degrees of freedom for this purpose. Because the tip of a micro manipulator needs multiple degrees of freedom, the proposed actuator can give three DOF, so that the micro manipulator can be improved to accomplish versatile skilful motions. The silicon based micro probe sensible to applied forces is attached at the tip of the actuators. Three modes of motion at the tip of the micro manipulator are demonstrated experimentally. Thus the proposed actuator demonstrates the feasibility of the micro actuator for the micro manipulator.
| Original language | English |
|---|---|
| Pages (from-to) | 1470-1474 |
| Number of pages | 5 |
| Journal | Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
| Volume | 56 |
| Issue number | 526 |
| Publication status | Published - 1990 Jun |
| Externally published | Yes |
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ASJC Scopus subject areas
- Mechanical Engineering
Cite this
Control of a micromanipulator. (3rd Report, mechanism and control of a microactuator). / Fukuda, Toshio; Nakamura, Tomoki; Tanaka, Takayasu; Esashi, Masaki; Shoji, Shuichi.
In: Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, Vol. 56, No. 526, 06.1990, p. 1470-1474.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Control of a micromanipulator. (3rd Report, mechanism and control of a microactuator)
AU - Fukuda, Toshio
AU - Nakamura, Tomoki
AU - Tanaka, Takayasu
AU - Esashi, Masaki
AU - Shoji, Shuichi
PY - 1990/6
Y1 - 1990/6
N2 - Since micro manipulation is necessary for handling micro order small objects, actuators suitable for a micro manipulator have long been studied. Unlike the conventional actuators, this paper proposes a new electro static actuator with three degrees of freedom for this purpose. Because the tip of a micro manipulator needs multiple degrees of freedom, the proposed actuator can give three DOF, so that the micro manipulator can be improved to accomplish versatile skilful motions. The silicon based micro probe sensible to applied forces is attached at the tip of the actuators. Three modes of motion at the tip of the micro manipulator are demonstrated experimentally. Thus the proposed actuator demonstrates the feasibility of the micro actuator for the micro manipulator.
AB - Since micro manipulation is necessary for handling micro order small objects, actuators suitable for a micro manipulator have long been studied. Unlike the conventional actuators, this paper proposes a new electro static actuator with three degrees of freedom for this purpose. Because the tip of a micro manipulator needs multiple degrees of freedom, the proposed actuator can give three DOF, so that the micro manipulator can be improved to accomplish versatile skilful motions. The silicon based micro probe sensible to applied forces is attached at the tip of the actuators. Three modes of motion at the tip of the micro manipulator are demonstrated experimentally. Thus the proposed actuator demonstrates the feasibility of the micro actuator for the micro manipulator.
UR - http://www.scopus.com/inward/record.url?scp=0025441389&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0025441389&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0025441389
VL - 56
SP - 1470
EP - 1474
JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
JF - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
SN - 0387-5024
IS - 526
ER -