Controlled polarizability of one-nanometer-thick oxide nanosheets for tailored, high-κ nanodielectrics

Minoru Osada, Genki Takanashi, Bao Wen Li, Kosho Akatsuka, Yasuo Ebina, Kanta Ono, Hiroshi Funakubo, Kazunori Takada, Takayoshi Sasaki

Research output: Contribution to journalArticle

48 Citations (Scopus)

Abstract

An important challenge in current microelectronics research is the development of techniques for making smaller, higher-performance electronic components. In this context, the fabrication and integration of ultrathin high-κ dielectrics with good insulating properties is an important issue. Here, we report on a rational approach to produce high-performance nanodielectrics using one-nanometer-thick oxide nanosheets as a building block. In titano niobate nanosheets (TiNbO5, Ti2NbO7, Ti5NbO14), the octahedral distortion inherent to site-engineering by Nb incorporation results in a giant molecular polarizability, and their multilayer nanofilms exhibit a high dielectric constant (160-320), the largest value seen so far in high-κ nanofilms with thickness down to 10 nm. Furthermore, these superior high-κ properties are fairly temperature-independent with low leakage-current density (<10 -7 A cm-2). This work may provide a new recipe for designing nanodielectrics desirable for practical high-κ devices.

Original languageEnglish
Pages (from-to)3482-3487
Number of pages6
JournalAdvanced Functional Materials
Volume21
Issue number18
DOIs
Publication statusPublished - 2011 Sep 23
Externally publishedYes

Fingerprint

Nanosheets
Oxides
oxides
niobates
microelectronics
Microelectronics
Leakage currents
Multilayers
leakage
Permittivity
Current density
engineering
permittivity
current density
Fabrication
fabrication
electronics
Temperature
temperature

Keywords

  • doping
  • high-κ dielectrics
  • layer-by-layer assembly
  • oxide nanosheets
  • site engineering

ASJC Scopus subject areas

  • Biomaterials
  • Electrochemistry
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Osada, M., Takanashi, G., Li, B. W., Akatsuka, K., Ebina, Y., Ono, K., ... Sasaki, T. (2011). Controlled polarizability of one-nanometer-thick oxide nanosheets for tailored, high-κ nanodielectrics. Advanced Functional Materials, 21(18), 3482-3487. https://doi.org/10.1002/adfm.201100580

Controlled polarizability of one-nanometer-thick oxide nanosheets for tailored, high-κ nanodielectrics. / Osada, Minoru; Takanashi, Genki; Li, Bao Wen; Akatsuka, Kosho; Ebina, Yasuo; Ono, Kanta; Funakubo, Hiroshi; Takada, Kazunori; Sasaki, Takayoshi.

In: Advanced Functional Materials, Vol. 21, No. 18, 23.09.2011, p. 3482-3487.

Research output: Contribution to journalArticle

Osada, M, Takanashi, G, Li, BW, Akatsuka, K, Ebina, Y, Ono, K, Funakubo, H, Takada, K & Sasaki, T 2011, 'Controlled polarizability of one-nanometer-thick oxide nanosheets for tailored, high-κ nanodielectrics', Advanced Functional Materials, vol. 21, no. 18, pp. 3482-3487. https://doi.org/10.1002/adfm.201100580
Osada, Minoru ; Takanashi, Genki ; Li, Bao Wen ; Akatsuka, Kosho ; Ebina, Yasuo ; Ono, Kanta ; Funakubo, Hiroshi ; Takada, Kazunori ; Sasaki, Takayoshi. / Controlled polarizability of one-nanometer-thick oxide nanosheets for tailored, high-κ nanodielectrics. In: Advanced Functional Materials. 2011 ; Vol. 21, No. 18. pp. 3482-3487.
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