Conversion characteristics of the shear wave transducer made of unidirectionally aligned ZnO film in plane

Takuya Nohara, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Using an RF magnetron sputtering apparatus, we have fabricated polycrystalline ZnO films whose crystallite c-axes aligned unidirectionally in substrate planes. The films were fabricated by inclining a deposition substrate 30° to an anode and showed a high crystallite orientation in a large area. The conversion losses of shear wave transducers with these films were estimated by S11 analysis. The relationship between the loss and crystalline alignment of the films was carefully investigated by X-ray diffraction measurement.

Original languageEnglish
Pages (from-to)4201-4203
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number5 A
DOIs
Publication statusPublished - 2006 May 9
Externally publishedYes

Keywords

  • BAW device
  • Conversion loss
  • Pole figure analysis
  • RF magnetron sputtering
  • Rocking curve
  • Shear wave transducer
  • ZnO film

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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