Coverage and properties of a-SiNx hard disk overcoat

Bing K. Yen*, Richard L. White, Robert J. Waltman, C. Mathew Mate, Yoshiaki Sonobe, Bruno Marchon

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

44 Citations (Scopus)

Abstract

The study of coverage and properties of amorphous silicon nitride (a-SiNx) overcoats deposited on magnetic disks by rf-reactive sputtering was presented. It was found by the use of x-ray photoelectron spectroscopy that amorphous silicon nitride has a low coverage-limit of ∼10 Å. It was concluded that the superior performance of a-SiNx disk overcoat may be attributed to its high hardness and dense structure.

Original languageEnglish
Pages (from-to)8704-8706
Number of pages3
JournalJournal of Applied Physics
Volume93
Issue number10 3
DOIs
Publication statusPublished - 2003 May 15
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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