Crystalline structures of YAlO3 single crystal at high temperatures

Takahiro Inoue, Takaaki Morimoto, Shoji Kaneko, Yosuke Horii, Yoshimichi Ohki

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    In order to clarify the influence of high temperature annealing on a next-generation gate insulating material YAlO3, single crystal YAlO3 samples were annealed at various temperatures from 900 to 1300°C in air for about 12 hours. The crystalline structure was examined by X-ray diffractometry, while the surface profile was examined by atomic force microscopy and a surface profilometer. Furthermore, infrared absorption spectroscopy and optical microscopy were used. As a result, the following serial changes in structure were estimated. The perovskite structure of crystalline YAlO3 starts to collapse and Y3Al5O 12 (YAG) is formed by the annealing at 1160 °C. Then, it segregates to Al2O3 andYAlO3 after the annealing at 1300 °C.

    Original languageEnglish
    Title of host publicationProceedings of the International Symposium on Electrical Insulating Materials
    PublisherInstitute of Electrical Engineers of Japan
    Pages208-211
    Number of pages4
    ISBN (Print)9784886860866
    DOIs
    Publication statusPublished - 2014
    Event2014 International Symposium on Electrical Insulating Materials, ISEIM 2014 - Niigata
    Duration: 2014 Jun 12014 Jun 5

    Other

    Other2014 International Symposium on Electrical Insulating Materials, ISEIM 2014
    CityNiigata
    Period14/6/114/6/5

    Fingerprint

    Single crystals
    Annealing
    Crystalline materials
    Insulating materials
    Infrared absorption
    Absorption spectroscopy
    Perovskite
    Temperature
    X ray diffraction analysis
    Optical microscopy
    Infrared spectroscopy
    Atomic force microscopy
    Air
    perovskite

    Keywords

    • Structural changes
    • Thermal annealing
    • X-ray diffractometry

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

    Cite this

    Inoue, T., Morimoto, T., Kaneko, S., Horii, Y., & Ohki, Y. (2014). Crystalline structures of YAlO3 single crystal at high temperatures. In Proceedings of the International Symposium on Electrical Insulating Materials (pp. 208-211). [6870755] Institute of Electrical Engineers of Japan. https://doi.org/10.1109/ISEIM.2014.6870755

    Crystalline structures of YAlO3 single crystal at high temperatures. / Inoue, Takahiro; Morimoto, Takaaki; Kaneko, Shoji; Horii, Yosuke; Ohki, Yoshimichi.

    Proceedings of the International Symposium on Electrical Insulating Materials. Institute of Electrical Engineers of Japan, 2014. p. 208-211 6870755.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Inoue, T, Morimoto, T, Kaneko, S, Horii, Y & Ohki, Y 2014, Crystalline structures of YAlO3 single crystal at high temperatures. in Proceedings of the International Symposium on Electrical Insulating Materials., 6870755, Institute of Electrical Engineers of Japan, pp. 208-211, 2014 International Symposium on Electrical Insulating Materials, ISEIM 2014, Niigata, 14/6/1. https://doi.org/10.1109/ISEIM.2014.6870755
    Inoue T, Morimoto T, Kaneko S, Horii Y, Ohki Y. Crystalline structures of YAlO3 single crystal at high temperatures. In Proceedings of the International Symposium on Electrical Insulating Materials. Institute of Electrical Engineers of Japan. 2014. p. 208-211. 6870755 https://doi.org/10.1109/ISEIM.2014.6870755
    Inoue, Takahiro ; Morimoto, Takaaki ; Kaneko, Shoji ; Horii, Yosuke ; Ohki, Yoshimichi. / Crystalline structures of YAlO3 single crystal at high temperatures. Proceedings of the International Symposium on Electrical Insulating Materials. Institute of Electrical Engineers of Japan, 2014. pp. 208-211
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