Crystallinity and strength of diamond bombarded with low energy ion beams

Iwao Miyamoto; Kazuhito Nishimura; Kozo Kawata; Hiroshi Kawarada; Shoichi Shimada

doi:10.1016/0168-583X(89)90875-6

Crystallinity and strength of diamond bombarded with low energy ion beams

Iwao Miyamoto^*, Kazuhito Nishimura, Kozo Kawata, Hiroshi Kawarada, Shoichi Shimada

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.

Original language	English
Pages (from-to)	689-691
Number of pages	3
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	39
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(89)90875-6
Publication status	Published - 1989 Mar 2
Externally published	Yes

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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10.1016/0168-583X(89)90875-6

Cite this

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title = "Crystallinity and strength of diamond bombarded with low energy ion beams",

abstract = "In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.",

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T1 - Crystallinity and strength of diamond bombarded with low energy ion beams

AU - Miyamoto, Iwao

AU - Nishimura, Kazuhito

AU - Kawata, Kozo

AU - Kawarada, Hiroshi

AU - Shimada, Shoichi

PY - 1989/3/2

Y1 - 1989/3/2

N2 - In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.

AB - In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.

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Crystallinity and strength of diamond bombarded with low energy ion beams

Abstract

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