Crystallinity and strength of diamond bombarded with low energy ion beams

Iwao Miyamoto, Kazuhito Nishimura, Kozo Kawata, Hiroshi Kawarada, Shoichi Shimada

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.

Original languageEnglish
Pages (from-to)689-691
Number of pages3
JournalNuclear Inst. and Methods in Physics Research, B
Volume39
Issue number1-4
DOIs
Publication statusPublished - 1989 Mar 2
Externally publishedYes

Fingerprint

Diamond
Ion beams
Diamonds
crystallinity
diamonds
ion beams
hydrogen plasma
Ions
Hydrogen
Plasmas
Argon
ions
energy
bombardment
Lapping
argon
Reflection high energy electron diffraction
Ion bombardment
Processing
Indentation

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Crystallinity and strength of diamond bombarded with low energy ion beams. / Miyamoto, Iwao; Nishimura, Kazuhito; Kawata, Kozo; Kawarada, Hiroshi; Shimada, Shoichi.

In: Nuclear Inst. and Methods in Physics Research, B, Vol. 39, No. 1-4, 02.03.1989, p. 689-691.

Research output: Contribution to journalArticle

Miyamoto, Iwao ; Nishimura, Kazuhito ; Kawata, Kozo ; Kawarada, Hiroshi ; Shimada, Shoichi. / Crystallinity and strength of diamond bombarded with low energy ion beams. In: Nuclear Inst. and Methods in Physics Research, B. 1989 ; Vol. 39, No. 1-4. pp. 689-691.
@article{557dc4e0c78743febdfefe85526858b5,
title = "Crystallinity and strength of diamond bombarded with low energy ion beams",
abstract = "In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.",
author = "Iwao Miyamoto and Kazuhito Nishimura and Kozo Kawata and Hiroshi Kawarada and Shoichi Shimada",
year = "1989",
month = "3",
day = "2",
doi = "10.1016/0168-583X(89)90875-6",
language = "English",
volume = "39",
pages = "689--691",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "1-4",

}

TY - JOUR

T1 - Crystallinity and strength of diamond bombarded with low energy ion beams

AU - Miyamoto, Iwao

AU - Nishimura, Kazuhito

AU - Kawata, Kozo

AU - Kawarada, Hiroshi

AU - Shimada, Shoichi

PY - 1989/3/2

Y1 - 1989/3/2

N2 - In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.

AB - In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.

UR - http://www.scopus.com/inward/record.url?scp=0024620453&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024620453&partnerID=8YFLogxK

U2 - 10.1016/0168-583X(89)90875-6

DO - 10.1016/0168-583X(89)90875-6

M3 - Article

VL - 39

SP - 689

EP - 691

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1-4

ER -