Crystallization of Diamond Using Energetic Ion Beam up to 400 keV

Masahiko Ogura, Masataka Hasegawa, Yasunori Tanaka, Naoto Kobayashi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)137-140
Number of pages4
JournalNew Diamond and Frontier Carbon Technology
Volume9
Issue number2
Publication statusPublished - 1999
Externally publishedYes

Keywords

  • Annealing
  • Diamond
  • Implantation
  • Semiconductor

ASJC Scopus subject areas

  • Materials Science(all)
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

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