Cyclo-Olefin Polymer direct bonding using low temperature plasma activation bonding

Jun Mizuno, Hiroyuki Ishida, Sharron Farrens, Viorel Dragoi, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Thomas Glinsner, Friedrich P. Lindner, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

17 Citations (Scopus)

Abstract

Low temperature direct bonding method of Cyclo-Olefm Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle measurement on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

Original languageEnglish
Title of host publicationDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Pages1346-1349
Number of pages4
Volume2
DOIs
Publication statusPublished - 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul
Duration: 2005 Jun 52005 Jun 9

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CitySeoul
Period05/6/505/6/9

Fingerprint

Olefins
Chemical activation
Plasmas
Polymers
Angle measurement
Interfacial energy
Temperature
Contact angle
Residual stresses
Molecules
Gases

Keywords

  • Activation
  • Bonding
  • COP
  • Micro-channel
  • Plasma

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mizuno, J., Ishida, H., Farrens, S., Dragoi, V., Shinohara, H., Suzuki, T., ... Shoji, S. (2005). Cyclo-Olefin Polymer direct bonding using low temperature plasma activation bonding. In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 (Vol. 2, pp. 1346-1349). [3E4.8] https://doi.org/10.1109/SENSOR.2005.1497330

Cyclo-Olefin Polymer direct bonding using low temperature plasma activation bonding. / Mizuno, Jun; Ishida, Hiroyuki; Farrens, Sharron; Dragoi, Viorel; Shinohara, Hidetoshi; Suzuki, Takafumi; Ishizuka, Masanori; Glinsner, Thomas; Lindner, Friedrich P.; Shoji, Shuichi.

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2 2005. p. 1346-1349 3E4.8.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mizuno, J, Ishida, H, Farrens, S, Dragoi, V, Shinohara, H, Suzuki, T, Ishizuka, M, Glinsner, T, Lindner, FP & Shoji, S 2005, Cyclo-Olefin Polymer direct bonding using low temperature plasma activation bonding. in Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. vol. 2, 3E4.8, pp. 1346-1349, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, 05/6/5. https://doi.org/10.1109/SENSOR.2005.1497330
Mizuno J, Ishida H, Farrens S, Dragoi V, Shinohara H, Suzuki T et al. Cyclo-Olefin Polymer direct bonding using low temperature plasma activation bonding. In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2. 2005. p. 1346-1349. 3E4.8 https://doi.org/10.1109/SENSOR.2005.1497330
Mizuno, Jun ; Ishida, Hiroyuki ; Farrens, Sharron ; Dragoi, Viorel ; Shinohara, Hidetoshi ; Suzuki, Takafumi ; Ishizuka, Masanori ; Glinsner, Thomas ; Lindner, Friedrich P. ; Shoji, Shuichi. / Cyclo-Olefin Polymer direct bonding using low temperature plasma activation bonding. Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 2 2005. pp. 1346-1349
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