Cyclo-Olefin Polymer direct bonding using low temperature plasma activation bonding

Jun Mizuno, Hiroyuki Ishida, Sharron Farrens, Viorel Dragoi, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Thomas Glinsner, Friedrich P. Lindner, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

17 Citations (Scopus)

Abstract

Low temperature direct bonding method of Cyclo-Olefm Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle measurement on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1346-1349
Number of pages4
DOIs
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume2

Conference

Conference13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

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Keywords

  • Activation
  • Bonding
  • COP
  • Micro-channel
  • Plasma

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mizuno, J., Ishida, H., Farrens, S., Dragoi, V., Shinohara, H., Suzuki, T., Ishizuka, M., Glinsner, T., Lindner, F. P., & Shoji, S. (2005). Cyclo-Olefin Polymer direct bonding using low temperature plasma activation bonding. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1346-1349). [3E4.8] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2). https://doi.org/10.1109/SENSOR.2005.1497330