Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding

Jun Mizuno, Sharon Farrens, Hiroyuki Ishida, Viorel Dragoi, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Thomas Glinsner, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

Original languageEnglish
Title of host publicationProceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Pages346-349
Number of pages4
DOIs
Publication statusPublished - 2005
Event2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta
Duration: 2006 Jul 242006 Jul 27

Other

Other2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
CityBanff, Alberta
Period06/7/2406/7/27

Fingerprint

Olefins
Chemical activation
Plasmas
Polymers
Interfacial energy
Temperature
Contact angle
Residual stresses
Molecules
Gases

Keywords

  • Activation
  • Bonding
  • COP
  • Micro-channel
  • Plasma

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mizuno, J., Farrens, S., Ishida, H., Dragoi, V., Shinohara, H., Suzuki, T., ... Shoji, S. (2005). Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. In Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 (pp. 346-349). [1540849] https://doi.org/10.1109/ICMENS.2005.37

Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. / Mizuno, Jun; Farrens, Sharon; Ishida, Hiroyuki; Dragoi, Viorel; Shinohara, Hidetoshi; Suzuki, Takafumi; Ishizuka, Masanori; Glinsner, Thomas; Shoji, Shuichi.

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. p. 346-349 1540849.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mizuno, J, Farrens, S, Ishida, H, Dragoi, V, Shinohara, H, Suzuki, T, Ishizuka, M, Glinsner, T & Shoji, S 2005, Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. in Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005., 1540849, pp. 346-349, 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005, Banff, Alberta, 06/7/24. https://doi.org/10.1109/ICMENS.2005.37
Mizuno J, Farrens S, Ishida H, Dragoi V, Shinohara H, Suzuki T et al. Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. In Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. p. 346-349. 1540849 https://doi.org/10.1109/ICMENS.2005.37
Mizuno, Jun ; Farrens, Sharon ; Ishida, Hiroyuki ; Dragoi, Viorel ; Shinohara, Hidetoshi ; Suzuki, Takafumi ; Ishizuka, Masanori ; Glinsner, Thomas ; Shoji, Shuichi. / Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. pp. 346-349
@inproceedings{d8589c6959ba41f49d4fd75c835daf3b,
title = "Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding",
abstract = "Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10{\%}-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.",
keywords = "Activation, Bonding, COP, Micro-channel, Plasma",
author = "Jun Mizuno and Sharon Farrens and Hiroyuki Ishida and Viorel Dragoi and Hidetoshi Shinohara and Takafumi Suzuki and Masanori Ishizuka and Thomas Glinsner and Shuichi Shoji",
year = "2005",
doi = "10.1109/ICMENS.2005.37",
language = "English",
isbn = "0769523986",
pages = "346--349",
booktitle = "Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005",

}

TY - GEN

T1 - Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding

AU - Mizuno, Jun

AU - Farrens, Sharon

AU - Ishida, Hiroyuki

AU - Dragoi, Viorel

AU - Shinohara, Hidetoshi

AU - Suzuki, Takafumi

AU - Ishizuka, Masanori

AU - Glinsner, Thomas

AU - Shoji, Shuichi

PY - 2005

Y1 - 2005

N2 - Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

AB - Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

KW - Activation

KW - Bonding

KW - COP

KW - Micro-channel

KW - Plasma

UR - http://www.scopus.com/inward/record.url?scp=33749050342&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33749050342&partnerID=8YFLogxK

U2 - 10.1109/ICMENS.2005.37

DO - 10.1109/ICMENS.2005.37

M3 - Conference contribution

AN - SCOPUS:33749050342

SN - 0769523986

SN - 9780769523989

SP - 346

EP - 349

BT - Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

ER -