Abstract
The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.
| Original language | English |
|---|---|
| Pages (from-to) | 37-41 |
| Number of pages | 5 |
| Journal | IEEJ Transactions on Sensors and Micromachines |
| Volume | 133 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2013 |
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Keywords
- Comb electrode
- Damping
- Nonparallel electrode
- Quartz
- Tilt sensor
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Damping characteristics of quartz tilt sensor with nonparallel comb electrode. / Kohsaka, Fusao; Liang, Jinxing; Ueda, Toshitsugu.
In: IEEJ Transactions on Sensors and Micromachines, Vol. 133, No. 2, 2013, p. 37-41.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Damping characteristics of quartz tilt sensor with nonparallel comb electrode
AU - Kohsaka, Fusao
AU - Liang, Jinxing
AU - Ueda, Toshitsugu
PY - 2013
Y1 - 2013
N2 - The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.
AB - The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.
KW - Comb electrode
KW - Damping
KW - Nonparallel electrode
KW - Quartz
KW - Tilt sensor
UR - http://www.scopus.com/inward/record.url?scp=84874161482&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84874161482&partnerID=8YFLogxK
U2 - 10.1541/ieejsms.133.37
DO - 10.1541/ieejsms.133.37
M3 - Article
VL - 133
SP - 37
EP - 41
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 2
ER -