Damping characteristics of quartz tilt sensor with nonparallel comb electrode

Fusao Kohsaka, Jinxing Liang, Toshitsugu Ueda

    Research output: Contribution to journalArticle

    Abstract

    The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.

    Original languageEnglish
    Pages (from-to)37-41
    Number of pages5
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume133
    Issue number2
    DOIs
    Publication statusPublished - 2013

    Keywords

    • Comb electrode
    • Damping
    • Nonparallel electrode
    • Quartz
    • Tilt sensor

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering

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