Damping characteristics of quartz tilt sensor with nonparallel comb electrode

Fusao Kohsaka; Jinxing Liang; Toshitsugu Ueda

doi:10.1541/ieejsms.133.37

Damping characteristics of quartz tilt sensor with nonparallel comb electrode

Fusao Kohsaka, Jinxing Liang, Toshitsugu Ueda

Research output: Contribution to journal › Article › peer-review

Abstract

The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.

Original language	English
Pages (from-to)	37-41
Number of pages	5
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	133
Issue number	2
DOIs	https://doi.org/10.1541/ieejsms.133.37
Publication status	Published - 2013

Keywords

Comb electrode
Damping
Nonparallel electrode
Quartz
Tilt sensor

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering

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abstract = "The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.",

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T1 - Damping characteristics of quartz tilt sensor with nonparallel comb electrode

AU - Kohsaka, Fusao

AU - Liang, Jinxing

AU - Ueda, Toshitsugu

PY - 2013

Y1 - 2013

N2 - The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.

AB - The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.

KW - Comb electrode

KW - Damping

KW - Nonparallel electrode

KW - Quartz

KW - Tilt sensor

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