Damping characteristics of quartz tilt sensor with nonparallel comb electrode

Fusao Kohsaka, Jinxing Liang, Toshitsugu Ueda

    Research output: Contribution to journalArticle

    Abstract

    The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.

    Original languageEnglish
    Pages (from-to)37-41
    Number of pages5
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume133
    Issue number2
    DOIs
    Publication statusPublished - 2013

    Fingerprint

    Quartz
    Damping
    Electrodes
    Sensors
    Fluids
    Numerical analysis
    Anisotropic etching
    Wet etching
    MEMS
    Finite element method

    Keywords

    • Comb electrode
    • Damping
    • Nonparallel electrode
    • Quartz
    • Tilt sensor

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering

    Cite this

    Damping characteristics of quartz tilt sensor with nonparallel comb electrode. / Kohsaka, Fusao; Liang, Jinxing; Ueda, Toshitsugu.

    In: IEEJ Transactions on Sensors and Micromachines, Vol. 133, No. 2, 2013, p. 37-41.

    Research output: Contribution to journalArticle

    Kohsaka, Fusao ; Liang, Jinxing ; Ueda, Toshitsugu. / Damping characteristics of quartz tilt sensor with nonparallel comb electrode. In: IEEJ Transactions on Sensors and Micromachines. 2013 ; Vol. 133, No. 2. pp. 37-41.
    @article{8ac1e032e38341adbf06aa7f1c983c48,
    title = "Damping characteristics of quartz tilt sensor with nonparallel comb electrode",
    abstract = "The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.",
    keywords = "Comb electrode, Damping, Nonparallel electrode, Quartz, Tilt sensor",
    author = "Fusao Kohsaka and Jinxing Liang and Toshitsugu Ueda",
    year = "2013",
    doi = "10.1541/ieejsms.133.37",
    language = "English",
    volume = "133",
    pages = "37--41",
    journal = "IEEJ Transactions on Sensors and Micromachines",
    issn = "1341-8939",
    publisher = "The Institute of Electrical Engineers of Japan",
    number = "2",

    }

    TY - JOUR

    T1 - Damping characteristics of quartz tilt sensor with nonparallel comb electrode

    AU - Kohsaka, Fusao

    AU - Liang, Jinxing

    AU - Ueda, Toshitsugu

    PY - 2013

    Y1 - 2013

    N2 - The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.

    AB - The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.

    KW - Comb electrode

    KW - Damping

    KW - Nonparallel electrode

    KW - Quartz

    KW - Tilt sensor

    UR - http://www.scopus.com/inward/record.url?scp=84874161482&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84874161482&partnerID=8YFLogxK

    U2 - 10.1541/ieejsms.133.37

    DO - 10.1541/ieejsms.133.37

    M3 - Article

    AN - SCOPUS:84874161482

    VL - 133

    SP - 37

    EP - 41

    JO - IEEJ Transactions on Sensors and Micromachines

    JF - IEEJ Transactions on Sensors and Micromachines

    SN - 1341-8939

    IS - 2

    ER -