Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses

Tatsunori Shibuya, Takashi Takahashi, Kazuyuki Sakaue, Thanh Hung Dinh, Hiroyuki Hara, Takeshi Higashiguchi, Masahiko Ishino, Yuya Koshiba, Masaharu Nishikino, Hiroshi Ogawa, Masahito Tanaka, Masakazu Washio, Yohei Kobayashi, Ryunosuke Kuroda

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5 Citations (Scopus)

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Physics & Astronomy