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Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses
Tatsunori Shibuya, Takashi Takahashi, Kazuyuki Sakaue, Thanh Hung Dinh, Hiroyuki Hara, Takeshi Higashiguchi, Masahiko Ishino, Yuya Koshiba, Masaharu Nishikino, Hiroshi Ogawa, Masahito Tanaka, Masakazu Washio, Yohei Kobayashi, Ryunosuke Kuroda
Research output: Contribution to journal › Article › peer-review
5
Citations
(Scopus)