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Dependence of photoluminescence characteristics of thermally oxidized hydrogenated amorphous silicon nanoball films on ion bombardment energy
Isamu Kato
*
, Takayuki Matsumoto
*
Corresponding author for this work
Waseda University
Research output
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Contribution to journal
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Article
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peer-review
3
Citations (Scopus)
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Dive into the research topics of 'Dependence of photoluminescence characteristics of thermally oxidized hydrogenated amorphous silicon nanoball films on ion bombardment energy'. Together they form a unique fingerprint.
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Engineering & Materials Science
Photoluminescence
100%
Ion bombardment
98%
Nanocrystals
92%
Amorphous silicon
84%
Bias voltage
15%
Chemical vapor deposition
14%
Plasmas
11%
Microwaves
10%
Oxygen
9%
Heating
8%
Substrates
8%
Gases
7%
Air
6%
Physics & Astronomy
silicon films
65%
bombardment
57%
amorphous silicon
56%
nanocrystals
54%
photoluminescence
43%
ions
28%
energy
18%
direct current
9%
vapor deposition
9%
microwaves
8%
heating
7%
oxygen
7%
air
7%
room temperature
6%
electric potential
6%
gases
6%