Dependence of plasma parameters on electric potential of electrode in microwave plasma

Isamu Kato, Toru Matsushita, Makoto Yamashita

Research output: Contribution to journalArticle

Abstract

The authors have been studying the double-tubed coaxial line-type microwave plasma chemical vapor deposition (MPCVD). The discharge tube of the present MPCVD is a dual-tube structure made of a fused quartz outer discharge tube and stainless steel inner tube. The authors have discovered that the ion bombardment energy can be controlled without varying the electron densities and temperature by changing the potential of the substrate placed in a spatial after-glow plasma. In the present research, it is found that the ion bombardment energy can also be controlled by changing the potential of the inner tube placed in the discharge plasma. However, the electron densities and temperature have exhibited a tendency different from the one when the substrate potential is varied. Hence, a theoretical calculation has been carried out on the electron densities and temperature based on Maxwell-Boltzmann distribution. It is found that a different tendency can be explained from the fact that the electrons successively vanish on the deposition chamber wall from the higher-energy side as the plasma spatial potential is reduced from about 13 V to 4 V so that the electron velocity distribution is modified.

Original languageEnglish
Pages (from-to)58-64
Number of pages7
JournalElectronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi)
Volume79
Issue number5
Publication statusPublished - 1996 May

Fingerprint

Microwaves
Electron temperature
Plasmas
microwaves
Electrodes
gas discharge tubes
electrodes
Gas discharge tubes
Electric potential
electric potential
Carrier concentration
electron energy
tubes
bombardment
Ion bombardment
tendencies
vapor deposition
Chemical vapor deposition
Boltzmann distribution
plasma jets

Keywords

  • Inner tube potential
  • Ion collision
  • Maxwell-Boltzmann distribution
  • Plasma parameters
  • Substrate potential

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Dependence of plasma parameters on electric potential of electrode in microwave plasma. / Kato, Isamu; Matsushita, Toru; Yamashita, Makoto.

In: Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi), Vol. 79, No. 5, 05.1996, p. 58-64.

Research output: Contribution to journalArticle

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