Deposition mechanism of trace metals on silicon wafer surfaces in ultra pure water

Takayuki Homma*, Jun Tsukano, Tetsuya Osaka, Masaharu Watanabe, Kiyoshi Nagai

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Deposition mechanism of trace metals on silicon wafer surfaces in ultra pure water'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds