Abstract
We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.
| Original language | English |
|---|---|
| Pages (from-to) | 927-929 |
| Number of pages | 3 |
| Journal | Physica C: Superconductivity and its applications |
| Volume | 463-465 |
| Issue number | SUPPL. |
| DOIs | |
| Publication status | Published - 2007 Oct 1 |
| Externally published | Yes |
Keywords
- HTSC
- MBE
- NBCO
- Thin film
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering
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Karimoto, S., Sato, H., Shibata, H., & Makimoto, T. (2007). Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter. Physica C: Superconductivity and its applications, 463-465(SUPPL.), 927-929. https://doi.org/10.1016/j.physc.2007.03.482