Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter

S. Karimoto; H. Sato; H. Shibata; T. Makimoto

doi:10.1016/j.physc.2007.03.482

Deposition of NdBa₂Cu₃O_7-δ thin films on large area of over 5 in. in diameter

S. Karimoto, H. Sato, H. Shibata, T. Makimoto

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We report the deposition of NdBa₂Cu₃O_7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and T_c for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The T_c values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.

Original language	English
Pages (from-to)	927-929
Number of pages	3
Journal	Physica C: Superconductivity and its applications
Volume	463-465
Issue number	SUPPL.
DOIs	https://doi.org/10.1016/j.physc.2007.03.482
Publication status	Published - 2007 Oct 1
Externally published	Yes

Keywords

HTSC
MBE
NBCO
Thin film

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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abstract = "We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.",

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AU - Karimoto, S.

AU - Sato, H.

AU - Shibata, H.

AU - Makimoto, T.

PY - 2007/10/1

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N2 - We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.

AB - We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.

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