Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter

S. Karimoto; H. Sato; H. Shibata; T. Makimoto

doi:10.1016/j.physc.2007.03.482

Deposition of NdBa₂Cu₃O_7-δ thin films on large area of over 5 in. in diameter

S. Karimoto^*, H. Sato, H. Shibata, T. Makimoto

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We report the deposition of NdBa₂Cu₃O_7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and T_c for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The T_c values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.

Original language	English
Pages (from-to)	927-929
Number of pages	3
Journal	Physica C: Superconductivity and its applications
Volume	463-465
Issue number	SUPPL.
DOIs	https://doi.org/10.1016/j.physc.2007.03.482
Publication status	Published - 2007 Oct 1
Externally published	Yes

Keywords

HTSC
MBE
NBCO
Thin film

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

Access to Document

10.1016/j.physc.2007.03.482

Cite this

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title = "Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter",

abstract = "We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.",

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T1 - Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter

AU - Karimoto, S.

AU - Sato, H.

AU - Shibata, H.

AU - Makimoto, T.

PY - 2007/10/1

Y1 - 2007/10/1

N2 - We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.

AB - We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.

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KW - MBE

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KW - Thin film

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