Abstract
We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.
| Original language | English |
|---|---|
| Pages (from-to) | 927-929 |
| Number of pages | 3 |
| Journal | Physica C: Superconductivity and its Applications |
| Volume | 463-465 |
| Issue number | SUPPL. |
| DOIs | |
| Publication status | Published - 2007 Oct 1 |
| Externally published | Yes |
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Keywords
- HTSC
- MBE
- NBCO
- Thin film
ASJC Scopus subject areas
- Condensed Matter Physics
Cite this
Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter. / Karimoto, S.; Sato, H.; Shibata, H.; Makimoto, Toshiki.
In: Physica C: Superconductivity and its Applications, Vol. 463-465, No. SUPPL., 01.10.2007, p. 927-929.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter
AU - Karimoto, S.
AU - Sato, H.
AU - Shibata, H.
AU - Makimoto, Toshiki
PY - 2007/10/1
Y1 - 2007/10/1
N2 - We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.
AB - We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.
KW - HTSC
KW - MBE
KW - NBCO
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=34548458997&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34548458997&partnerID=8YFLogxK
U2 - 10.1016/j.physc.2007.03.482
DO - 10.1016/j.physc.2007.03.482
M3 - Article
AN - SCOPUS:34548458997
VL - 463-465
SP - 927
EP - 929
JO - Physica C: Superconductivity and its Applications
JF - Physica C: Superconductivity and its Applications
SN - 0921-4534
IS - SUPPL.
ER -