Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter

S. Karimoto, H. Sato, H. Shibata, Toshiki Makimoto

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.

Original languageEnglish
Pages (from-to)927-929
Number of pages3
JournalPhysica C: Superconductivity and its Applications
Volume463-465
Issue numberSUPPL.
DOIs
Publication statusPublished - 2007 Oct 1
Externally publishedYes

Fingerprint

Thin films
thin films
Chemical analysis
Molecular beam epitaxy
molecular beam epitaxy

Keywords

  • HTSC
  • MBE
  • NBCO
  • Thin film

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter. / Karimoto, S.; Sato, H.; Shibata, H.; Makimoto, Toshiki.

In: Physica C: Superconductivity and its Applications, Vol. 463-465, No. SUPPL., 01.10.2007, p. 927-929.

Research output: Contribution to journalArticle

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