Depth resolution improvement in secondary ion mass spectrometry analysis using metal cluster complex ion bombardment

M. Tomita, T. Kinno, M. Koike, H. Tanaka, S. Takeno, Y. Fujiwara, K. Kondou, Y. Teranishi, H. Nonaka, T. Fujimoto, A. Kurokawa, S. Ichimura

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Abstract

Secondary ion mass spectrometry analyses were carried out using a metal cluster complex ion of Ir4(CO)7+ as a primary ion beam. Depth resolution was evaluated as a function of primary ion species, energy, and incident angle. The depth resolution obtained using cluster ion bombardment was considerably better than that obtained by oxygen ion bombardment under the same experimental condition due to reduction of atomic mixing in the depth. The authors obtained a depth resolution of ∼1 nm under 5 keV, 45° condition. Depth resolution was degraded by ion-bombardment-induced surface roughness at 5 keV with higher incident angles.

Original languageEnglish
Article number053123
JournalApplied Physics Letters
Volume89
Issue number5
DOIs
Publication statusPublished - 2006 Sep 14
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Tomita, M., Kinno, T., Koike, M., Tanaka, H., Takeno, S., Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Fujimoto, T., Kurokawa, A., & Ichimura, S. (2006). Depth resolution improvement in secondary ion mass spectrometry analysis using metal cluster complex ion bombardment. Applied Physics Letters, 89(5), [053123]. https://doi.org/10.1063/1.2266995