Abstract
An ozone jet generator was constructed to supply oxidizing reagent with high reactivity and low kinetic velocity, and was applied to the preparation of superconducting oxide thin films by an MBE method. Ozone jet was generated by evaporating the liquid (or solid) ozone accumulated in the ozone vessel of the generator. Precise pressure and temperature control of the ozone vessel in liquefying and evaporating ozone makes it possible to generate ozone jet with high purity, controllability, and reactivity which was evaluated by mass analysis, XPS analysis, etc. Some applications of the ozone jet generator in fabrication of superconducting oxide thin films were also reported.
| Original language | English |
|---|---|
| Pages (from-to) | 2-14 |
| Number of pages | 13 |
| Journal | Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory |
| Volume | 57 |
| Issue number | 4 |
| Publication status | Published - 1993 Jan 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
Cite this
Design and application of ozone jet generator as an oxidizing reagent source. / Ichimura, Shingo; Hosokawa, S.; Shimizu, H.
In: Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory, Vol. 57, No. 4, 01.01.1993, p. 2-14.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Design and application of ozone jet generator as an oxidizing reagent source
AU - Ichimura, Shingo
AU - Hosokawa, S.
AU - Shimizu, H.
PY - 1993/1/1
Y1 - 1993/1/1
N2 - An ozone jet generator was constructed to supply oxidizing reagent with high reactivity and low kinetic velocity, and was applied to the preparation of superconducting oxide thin films by an MBE method. Ozone jet was generated by evaporating the liquid (or solid) ozone accumulated in the ozone vessel of the generator. Precise pressure and temperature control of the ozone vessel in liquefying and evaporating ozone makes it possible to generate ozone jet with high purity, controllability, and reactivity which was evaluated by mass analysis, XPS analysis, etc. Some applications of the ozone jet generator in fabrication of superconducting oxide thin films were also reported.
AB - An ozone jet generator was constructed to supply oxidizing reagent with high reactivity and low kinetic velocity, and was applied to the preparation of superconducting oxide thin films by an MBE method. Ozone jet was generated by evaporating the liquid (or solid) ozone accumulated in the ozone vessel of the generator. Precise pressure and temperature control of the ozone vessel in liquefying and evaporating ozone makes it possible to generate ozone jet with high purity, controllability, and reactivity which was evaluated by mass analysis, XPS analysis, etc. Some applications of the ozone jet generator in fabrication of superconducting oxide thin films were also reported.
UR - http://www.scopus.com/inward/record.url?scp=0027150782&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0027150782&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0027150782
VL - 57
SP - 2
EP - 14
JO - Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory
JF - Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory
SN - 0366-9092
IS - 4
ER -