Design and application of ozone jet generator as an oxidizing reagent source

S. Ichimura, S. Hosokawa, H. Shimizu

Research output: Contribution to journalArticle

Abstract

An ozone jet generator was constructed to supply oxidizing reagent with high reactivity and low kinetic velocity, and was applied to the preparation of superconducting oxide thin films by an MBE method. Ozone jet was generated by evaporating the liquid (or solid) ozone accumulated in the ozone vessel of the generator. Precise pressure and temperature control of the ozone vessel in liquefying and evaporating ozone makes it possible to generate ozone jet with high purity, controllability, and reactivity which was evaluated by mass analysis, XPS analysis, etc. Some applications of the ozone jet generator in fabrication of superconducting oxide thin films were also reported.

Original languageEnglish
Pages (from-to)2-14
Number of pages13
JournalDenshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory
Volume57
Issue number4
Publication statusPublished - 1993 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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