An ozone jet generator was constructed to supply oxidizing reagent with high reactivity and low kinetic velocity, and was applied to the preparation of superconducting oxide thin films by an MBE method. Ozone jet was generated by evaporating the liquid (or solid) ozone accumulated in the ozone vessel of the generator. Precise pressure and temperature control of the ozone vessel in liquefying and evaporating ozone makes it possible to generate ozone jet with high purity, controllability, and reactivity which was evaluated by mass analysis, XPS analysis, etc. Some applications of the ozone jet generator in fabrication of superconducting oxide thin films were also reported.
|Number of pages||13|
|Journal||Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory|
|Publication status||Published - 1993|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering