Design and application of ozone jet generator as an oxidizing reagent source

Shingo Ichimura, S. Hosokawa, H. Shimizu

Research output: Contribution to journalArticle

Abstract

An ozone jet generator was constructed to supply oxidizing reagent with high reactivity and low kinetic velocity, and was applied to the preparation of superconducting oxide thin films by an MBE method. Ozone jet was generated by evaporating the liquid (or solid) ozone accumulated in the ozone vessel of the generator. Precise pressure and temperature control of the ozone vessel in liquefying and evaporating ozone makes it possible to generate ozone jet with high purity, controllability, and reactivity which was evaluated by mass analysis, XPS analysis, etc. Some applications of the ozone jet generator in fabrication of superconducting oxide thin films were also reported.

Original languageEnglish
Pages (from-to)2-14
Number of pages13
JournalDenshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory
Volume57
Issue number4
Publication statusPublished - 1993 Jan 1
Externally publishedYes

Fingerprint

Ozone
ozone
reagents
generators
Oxide films
vessels
reactivity
Thin films
Pressure control
oxides
controllability
temperature control
thin films
Controllability
Temperature control
Molecular beam epitaxy
purity
X ray photoelectron spectroscopy
Fabrication
preparation

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Design and application of ozone jet generator as an oxidizing reagent source. / Ichimura, Shingo; Hosokawa, S.; Shimizu, H.

In: Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory, Vol. 57, No. 4, 01.01.1993, p. 2-14.

Research output: Contribution to journalArticle

@article{e2eab59521084cb59c88dbeed78892ae,
title = "Design and application of ozone jet generator as an oxidizing reagent source",
abstract = "An ozone jet generator was constructed to supply oxidizing reagent with high reactivity and low kinetic velocity, and was applied to the preparation of superconducting oxide thin films by an MBE method. Ozone jet was generated by evaporating the liquid (or solid) ozone accumulated in the ozone vessel of the generator. Precise pressure and temperature control of the ozone vessel in liquefying and evaporating ozone makes it possible to generate ozone jet with high purity, controllability, and reactivity which was evaluated by mass analysis, XPS analysis, etc. Some applications of the ozone jet generator in fabrication of superconducting oxide thin films were also reported.",
author = "Shingo Ichimura and S. Hosokawa and H. Shimizu",
year = "1993",
month = "1",
day = "1",
language = "English",
volume = "57",
pages = "2--14",
journal = "Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory",
issn = "0366-9092",
publisher = "Denshi Gijutsu Sogo Kenkyujo",
number = "4",

}

TY - JOUR

T1 - Design and application of ozone jet generator as an oxidizing reagent source

AU - Ichimura, Shingo

AU - Hosokawa, S.

AU - Shimizu, H.

PY - 1993/1/1

Y1 - 1993/1/1

N2 - An ozone jet generator was constructed to supply oxidizing reagent with high reactivity and low kinetic velocity, and was applied to the preparation of superconducting oxide thin films by an MBE method. Ozone jet was generated by evaporating the liquid (or solid) ozone accumulated in the ozone vessel of the generator. Precise pressure and temperature control of the ozone vessel in liquefying and evaporating ozone makes it possible to generate ozone jet with high purity, controllability, and reactivity which was evaluated by mass analysis, XPS analysis, etc. Some applications of the ozone jet generator in fabrication of superconducting oxide thin films were also reported.

AB - An ozone jet generator was constructed to supply oxidizing reagent with high reactivity and low kinetic velocity, and was applied to the preparation of superconducting oxide thin films by an MBE method. Ozone jet was generated by evaporating the liquid (or solid) ozone accumulated in the ozone vessel of the generator. Precise pressure and temperature control of the ozone vessel in liquefying and evaporating ozone makes it possible to generate ozone jet with high purity, controllability, and reactivity which was evaluated by mass analysis, XPS analysis, etc. Some applications of the ozone jet generator in fabrication of superconducting oxide thin films were also reported.

UR - http://www.scopus.com/inward/record.url?scp=0027150782&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027150782&partnerID=8YFLogxK

M3 - Article

VL - 57

SP - 2

EP - 14

JO - Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory

JF - Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory

SN - 0366-9092

IS - 4

ER -