Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly

M. Ishizuka, M. Abe, H. Houjou, Shuichi Shoji, Jun Mizuno, K. Tsutsui, Y. Wada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

3-D metal embedded structure was realized by folding PDMS structure. Accurate angle of 90 degree between the each electrodes are obtained using the guide structure. A fluoro resin on the metal layer was used to avoid the clack resulting from residual stress and also to protect from organic solvent generating during photolithography. By applying high electric field of 2000 V/cm on facing electrodes, the static field effect on styrene polymer micro sphere is confirmed.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages999-1002
Number of pages4
Volume2
ISBN (Print)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Fingerprint

Fabrication
Electrodes
Photolithography
Metals
Organic solvents
Styrene
Residual stresses
Resins
Electric fields
Polymers

Keywords

  • Assembly
  • Chemical analysis
  • Electrodes
  • Fabrication
  • Fluidic microsystems
  • Inductors
  • Microchannel
  • Microfluidics
  • Silicon
  • Transducers

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Ishizuka, M., Abe, M., Houjou, H., Shoji, S., Mizuno, J., Tsutsui, K., & Wada, Y. (2003). Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 2, pp. 999-1002). [1216936] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216936

Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly. / Ishizuka, M.; Abe, M.; Houjou, H.; Shoji, Shuichi; Mizuno, Jun; Tsutsui, K.; Wada, Y.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 2003. p. 999-1002 1216936.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ishizuka, M, Abe, M, Houjou, H, Shoji, S, Mizuno, J, Tsutsui, K & Wada, Y 2003, Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. vol. 2, 1216936, Institute of Electrical and Electronics Engineers Inc., pp. 999-1002, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1216936
Ishizuka M, Abe M, Houjou H, Shoji S, Mizuno J, Tsutsui K et al. Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2. Institute of Electrical and Electronics Engineers Inc. 2003. p. 999-1002. 1216936 https://doi.org/10.1109/SENSOR.2003.1216936
Ishizuka, M. ; Abe, M. ; Houjou, H. ; Shoji, Shuichi ; Mizuno, Jun ; Tsutsui, K. ; Wada, Y. / Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 2003. pp. 999-1002
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AU - Tsutsui, K.

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