Detection of sputtered neutral atoms by nonresonant multiphoton ionization

Hazime Shimizu, Hiroko Hashizume, Shingo Ichimura, Kiyohide Kokubun

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Abstract

A nonresonant multiphoton ionization method was applied for the detection of sputtered neutrals using a time-of-flight mass spectrometer. The preliminary results for Cu, Ni and Cu-Ni alloy samples are reported from the viewpoint of a semiquantitative surface analysis. Photoions from pure elements were a reflection of their sputtering yield ratios. The estimated composition of an alloy during sputtering at room temperature is almost the same as that of bulk. On the other hand, anomalous copper-enriched flux was detected at 800 K, and the result was explained by the enhanced segregation and diffusion of copper through the ion-damaged surface layer.

Original languageEnglish
Pages (from-to)L502-L505
JournalJapanese journal of applied physics
Volume27
Issue number4A
DOIs
Publication statusPublished - 1988 Apr

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Keywords

  • Cu, Ni, Cu-Ni alloy
  • Excimer laser
  • Ion bombardment
  • Multiphoton ionization
  • Sputtered neutral
  • Surface segregation

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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