Abstract
An ozone generator meant for continuously supplying highly concentrated (HC) ozone gas for low-temprature oxidation process was presented. The generator comprised of four ozone vessels and could supply a constant flow of HC ozone by four modes of operations, such as accumulation, vaporization, evacuation and cooling to each of the ozone vessels. The maximum flow rate for a continuous supply of ozone gas was 60 sccm with a flux stability of ± 1.1%. It was shown that ozone concentration of over 99.5 % could be achieved by the ozone generators.
| Original language | English |
|---|---|
| Pages (from-to) | 1410-1414 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 22 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2004 Jul 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
Cite this
Development of a continuous generation/supply system of highly concentrated ozone gas for low-temperature oxidation process. / Ichimura, Shingo; Nonaka, Hidehiko; Morikawa, Yoshiki; Noyori, Tsuyoshi; Nishiguchi, Tetsuya; Kekura, Mitsuru.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 22, No. 4, 01.07.2004, p. 1410-1414.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Development of a continuous generation/supply system of highly concentrated ozone gas for low-temperature oxidation process
AU - Ichimura, Shingo
AU - Nonaka, Hidehiko
AU - Morikawa, Yoshiki
AU - Noyori, Tsuyoshi
AU - Nishiguchi, Tetsuya
AU - Kekura, Mitsuru
PY - 2004/7/1
Y1 - 2004/7/1
N2 - An ozone generator meant for continuously supplying highly concentrated (HC) ozone gas for low-temprature oxidation process was presented. The generator comprised of four ozone vessels and could supply a constant flow of HC ozone by four modes of operations, such as accumulation, vaporization, evacuation and cooling to each of the ozone vessels. The maximum flow rate for a continuous supply of ozone gas was 60 sccm with a flux stability of ± 1.1%. It was shown that ozone concentration of over 99.5 % could be achieved by the ozone generators.
AB - An ozone generator meant for continuously supplying highly concentrated (HC) ozone gas for low-temprature oxidation process was presented. The generator comprised of four ozone vessels and could supply a constant flow of HC ozone by four modes of operations, such as accumulation, vaporization, evacuation and cooling to each of the ozone vessels. The maximum flow rate for a continuous supply of ozone gas was 60 sccm with a flux stability of ± 1.1%. It was shown that ozone concentration of over 99.5 % could be achieved by the ozone generators.
UR - http://www.scopus.com/inward/record.url?scp=4344648995&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=4344648995&partnerID=8YFLogxK
U2 - 10.1116/1.1705592
DO - 10.1116/1.1705592
M3 - Article
AN - SCOPUS:4344648995
VL - 22
SP - 1410
EP - 1414
JO - Journal of Vacuum Science and Technology A
JF - Journal of Vacuum Science and Technology A
SN - 0734-2101
IS - 4
ER -