Abstract
An ozone generator meant for continuously supplying highly concentrated (HC) ozone gas for low-temprature oxidation process was presented. The generator comprised of four ozone vessels and could supply a constant flow of HC ozone by four modes of operations, such as accumulation, vaporization, evacuation and cooling to each of the ozone vessels. The maximum flow rate for a continuous supply of ozone gas was 60 sccm with a flux stability of ± 1.1%. It was shown that ozone concentration of over 99.5 % could be achieved by the ozone generators.
| Original language | English |
|---|---|
| Pages (from-to) | 1410-1414 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 22 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2004 Jul 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
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Cite this
Ichimura, S., Nonaka, H., Morikawa, Y., Noyori, T., Nishiguchi, T., & Kekura, M. (2004). Development of a continuous generation/supply system of highly concentrated ozone gas for low-temperature oxidation process. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 22(4), 1410-1414. https://doi.org/10.1116/1.1705592