Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES

Hiroyuki Kudo, Yuichi Yokoyama, Shuichi Shoji, Tohru Oshima, Youichi Aruga, Kana Maegami, Ryuichi Fujimoto, Miyazaki Toshiyuki, Kazuhisa Mitsuda

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    A prototype of an X-ray microcalorimeter using Titanium/Gold transition edge sensor (TES) for detecting cosmic rays is fabricated and tested. This paper reports first experimental result of the prototype. By using silicon bulk micromachining, freestanding microstructure suspended with fine beams are obtained to achieve thermal isolation from the substrate. A superconductor, Ti in this case, can be used as a very sensitive temperature sensor at the narrow temperature range around its transition temperature. At the low temperatures below 1 K, the microstructure with very small heat capacity is expected to be thermally detecting single photons. Design consideration to realize radiation detection with extremely good energy resolution has been taken place. Our tentative goal is to obtain the energy resolution of 20 eV for 10 keV radiation at 0.5 K. We have fabricated a test device of the TES. The sensitivity of it is larger than 1000, which is enough for this purpose. The energy resolution of the prototype of the X-ray microcalorimeter was 550 eV (FWHM) for 6 keV radiation at approximately 0.5 K. This value is smaller than that expected. An optimization of the TES features is still necessary for a good energy resolution.

    Original languageEnglish
    Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
    PublisherSociety of Photo-Optical Instrumentation Engineers
    Pages241-249
    Number of pages9
    Volume3893
    Publication statusPublished - 1999
    EventProceedings of the 1999 Design, Characterization, and Packaging for MEMS and Microelectronics - Royal Pines Resort, Aust
    Duration: 1999 Oct 271999 Oct 29

    Other

    OtherProceedings of the 1999 Design, Characterization, and Packaging for MEMS and Microelectronics
    CityRoyal Pines Resort, Aust
    Period99/10/2799/10/29

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    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Condensed Matter Physics

    Cite this

    Kudo, H., Yokoyama, Y., Shoji, S., Oshima, T., Aruga, Y., Maegami, K., Fujimoto, R., Toshiyuki, M., & Mitsuda, K. (1999). Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3893, pp. 241-249). Society of Photo-Optical Instrumentation Engineers.