Development of an electrohydrodynamic ion-drag micropump using three-dimensional carbon micromesh electrodes

Dong Hyun Yoon, Hironobu Sato, Asahi Nakahara, Tetsushi Sekiguchi, Satoshi Konishi, Shuichi Shoji

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

An electrohydrodynamic (EHD) ion-drag micropump using three-dimensional carbon micromesh electrodes was developed. The carbon micromesh electrodes were created by the pyrolysis of SU-8 structures. The carbon electrodes and microchannel were formed on a quartz substrate, and the microchannel was sealed by an SU-8 slab structure. The pumping behaviors were evaluated using Fluorinert as a non-conductive sample solution. The maximum pressure and volume flow rate were approximately 23 Pa and 400 nL/min, respectively, under an applied voltage of 500 V.

Original languageEnglish
Article number095003
JournalJournal of Micromechanics and Microengineering
Volume24
Issue number9
DOIs
Publication statusPublished - 2014 Sep 1

Keywords

  • EHD micropump
  • SU-8 pyrolysis
  • carbon electrode
  • micromesh

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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