Development of an ion beam alignment system for real-time scanning tunneling microscope observation of dopant-ion irradiation

Takefumi Kamioka, Kou Sato, Yutaka Kazama, Takanobu Watanabe, Iwao Ohdomari

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    An ion beam alignment system has been developed in order to realize real-time scanning tunneling microscope (STM) observation of "dopant-ion" irradiation that has been difficult due to the low emission intensity of the liquid-metal-ion-source (LMIS) containing dopant atoms. The alignment system is installed in our original ion gun and STM combined system (IG/STM) which is used for in situ STM observation during ion irradiation. By using an absorbed electron image unit and a dummy sample, ion beam alignment operation is drastically simplified and accurized. We demonstrate that sequential STM images during phosphorus-ion irradiation are successfully obtained for sample surfaces of Si(111) -7 × 7 at room temperature and a high temperature of 500 °C. The LMIS-IG/STM equipped with the developed ion beam alignment system would be a powerful tool for microscopic investigation of the dynamic processes of ion irradiation.

    Original languageEnglish
    Article number073707
    JournalReview of Scientific Instruments
    Volume79
    Issue number7
    DOIs
    Publication statusPublished - 2008

    Fingerprint

    Ion bombardment
    ion irradiation
    Ion beams
    Microscopes
    ion beams
    alignment
    microscopes
    Doping (additives)
    Scanning
    scanning
    Ion sources
    liquid metals
    Liquid metals
    ion sources
    Metal ions
    metal ions
    dummies
    phosphorus
    Phosphorus
    Atoms

    ASJC Scopus subject areas

    • Instrumentation
    • Physics and Astronomy (miscellaneous)

    Cite this

    Development of an ion beam alignment system for real-time scanning tunneling microscope observation of dopant-ion irradiation. / Kamioka, Takefumi; Sato, Kou; Kazama, Yutaka; Watanabe, Takanobu; Ohdomari, Iwao.

    In: Review of Scientific Instruments, Vol. 79, No. 7, 073707, 2008.

    Research output: Contribution to journalArticle

    @article{fedd8619b06349488a25a58395330101,
    title = "Development of an ion beam alignment system for real-time scanning tunneling microscope observation of dopant-ion irradiation",
    abstract = "An ion beam alignment system has been developed in order to realize real-time scanning tunneling microscope (STM) observation of {"}dopant-ion{"} irradiation that has been difficult due to the low emission intensity of the liquid-metal-ion-source (LMIS) containing dopant atoms. The alignment system is installed in our original ion gun and STM combined system (IG/STM) which is used for in situ STM observation during ion irradiation. By using an absorbed electron image unit and a dummy sample, ion beam alignment operation is drastically simplified and accurized. We demonstrate that sequential STM images during phosphorus-ion irradiation are successfully obtained for sample surfaces of Si(111) -7 × 7 at room temperature and a high temperature of 500 °C. The LMIS-IG/STM equipped with the developed ion beam alignment system would be a powerful tool for microscopic investigation of the dynamic processes of ion irradiation.",
    author = "Takefumi Kamioka and Kou Sato and Yutaka Kazama and Takanobu Watanabe and Iwao Ohdomari",
    year = "2008",
    doi = "10.1063/1.2957608",
    language = "English",
    volume = "79",
    journal = "Review of Scientific Instruments",
    issn = "0034-6748",
    publisher = "American Institute of Physics Publising LLC",
    number = "7",

    }

    TY - JOUR

    T1 - Development of an ion beam alignment system for real-time scanning tunneling microscope observation of dopant-ion irradiation

    AU - Kamioka, Takefumi

    AU - Sato, Kou

    AU - Kazama, Yutaka

    AU - Watanabe, Takanobu

    AU - Ohdomari, Iwao

    PY - 2008

    Y1 - 2008

    N2 - An ion beam alignment system has been developed in order to realize real-time scanning tunneling microscope (STM) observation of "dopant-ion" irradiation that has been difficult due to the low emission intensity of the liquid-metal-ion-source (LMIS) containing dopant atoms. The alignment system is installed in our original ion gun and STM combined system (IG/STM) which is used for in situ STM observation during ion irradiation. By using an absorbed electron image unit and a dummy sample, ion beam alignment operation is drastically simplified and accurized. We demonstrate that sequential STM images during phosphorus-ion irradiation are successfully obtained for sample surfaces of Si(111) -7 × 7 at room temperature and a high temperature of 500 °C. The LMIS-IG/STM equipped with the developed ion beam alignment system would be a powerful tool for microscopic investigation of the dynamic processes of ion irradiation.

    AB - An ion beam alignment system has been developed in order to realize real-time scanning tunneling microscope (STM) observation of "dopant-ion" irradiation that has been difficult due to the low emission intensity of the liquid-metal-ion-source (LMIS) containing dopant atoms. The alignment system is installed in our original ion gun and STM combined system (IG/STM) which is used for in situ STM observation during ion irradiation. By using an absorbed electron image unit and a dummy sample, ion beam alignment operation is drastically simplified and accurized. We demonstrate that sequential STM images during phosphorus-ion irradiation are successfully obtained for sample surfaces of Si(111) -7 × 7 at room temperature and a high temperature of 500 °C. The LMIS-IG/STM equipped with the developed ion beam alignment system would be a powerful tool for microscopic investigation of the dynamic processes of ion irradiation.

    UR - http://www.scopus.com/inward/record.url?scp=49149123078&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=49149123078&partnerID=8YFLogxK

    U2 - 10.1063/1.2957608

    DO - 10.1063/1.2957608

    M3 - Article

    VL - 79

    JO - Review of Scientific Instruments

    JF - Review of Scientific Instruments

    SN - 0034-6748

    IS - 7

    M1 - 073707

    ER -