Development of compact EUV source based on laser compton scattering

S. Kashiwagi, R. Kato, J. Yang, G. Isoyama, Kazuyuki Sakaue, A. Masuda, T. Nomoto, T. Gowa, Masakazu Washio, R. Kuroda, J. Urakawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

High-power extreme ultra-violet (EUV) sources are required for next generation semiconductor lithography. We start developing a compact EUV source in the spectral range of 13-14 nm, which is based on laser Compton scattering between a 7 MeV electron beam and a high intensity CO2 laser pulse. Before the main laser Compton scattering for EUV radiation, the electron beam is prebunched by a high power seeding laser pulse with the Compton wavelength at a harmonic of the seeding laser [1]. In this paper, we describe the preliminary consideration for the EUV source development and a plan of experiment generating micro-bunched electron beam.

Original languageEnglish
Title of host publicationProceedings of the IEEE Particle Accelerator Conference
Pages2799-2801
Number of pages3
DOIs
Publication statusPublished - 2007
EventIEEE Particle Accelerator Conference, PAC07 - Albuquerque, NM
Duration: 2007 Jun 252007 Jun 29

Other

OtherIEEE Particle Accelerator Conference, PAC07
CityAlbuquerque, NM
Period07/6/2507/6/29

Fingerprint

Compton scattering
Electron beams
Lasers
Laser pulses
Ultraviolet radiation
Lithography
Semiconductor materials
Wavelength
Experiments

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kashiwagi, S., Kato, R., Yang, J., Isoyama, G., Sakaue, K., Masuda, A., ... Urakawa, J. (2007). Development of compact EUV source based on laser compton scattering. In Proceedings of the IEEE Particle Accelerator Conference (pp. 2799-2801). [4440580] https://doi.org/10.1109/PAC.2007.4440580

Development of compact EUV source based on laser compton scattering. / Kashiwagi, S.; Kato, R.; Yang, J.; Isoyama, G.; Sakaue, Kazuyuki; Masuda, A.; Nomoto, T.; Gowa, T.; Washio, Masakazu; Kuroda, R.; Urakawa, J.

Proceedings of the IEEE Particle Accelerator Conference. 2007. p. 2799-2801 4440580.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kashiwagi, S, Kato, R, Yang, J, Isoyama, G, Sakaue, K, Masuda, A, Nomoto, T, Gowa, T, Washio, M, Kuroda, R & Urakawa, J 2007, Development of compact EUV source based on laser compton scattering. in Proceedings of the IEEE Particle Accelerator Conference., 4440580, pp. 2799-2801, IEEE Particle Accelerator Conference, PAC07, Albuquerque, NM, 07/6/25. https://doi.org/10.1109/PAC.2007.4440580
Kashiwagi S, Kato R, Yang J, Isoyama G, Sakaue K, Masuda A et al. Development of compact EUV source based on laser compton scattering. In Proceedings of the IEEE Particle Accelerator Conference. 2007. p. 2799-2801. 4440580 https://doi.org/10.1109/PAC.2007.4440580
Kashiwagi, S. ; Kato, R. ; Yang, J. ; Isoyama, G. ; Sakaue, Kazuyuki ; Masuda, A. ; Nomoto, T. ; Gowa, T. ; Washio, Masakazu ; Kuroda, R. ; Urakawa, J. / Development of compact EUV source based on laser compton scattering. Proceedings of the IEEE Particle Accelerator Conference. 2007. pp. 2799-2801
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