Development of highly integrated quartz micro-electro-mechanical system tilt sensor

Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Ken Kunitomo, Toshitsugu Ueda

    Research output: Contribution to journalArticle

    6 Citations (Scopus)

    Abstract

    In this paper, we report the research progress of a recently developed quartz micro-electro-mechanical system (MEMS)-based capacitive tilt sensor using bulk micromachining technology. The sensor, which is composed of a sensitive cantilever, proof mass and high-aspect- ratio vertical comb electrodes in wafer thickness was fabricated using an anisotropic wet etching process on a 100-um-thick z-cut quartz wafer. A ceramic package was designed for mounting the sensor and integrating the capacitance to a digital AD7746 circuit (Analog Devices). The sensor was mounted on the package using a flip chip method via a AuSn alloy solder. The dimensions of the integrated sensing system are 12 × 12 × 3.2 mm3 and the weight of the system is below 1 g. The measured typical sensor sensitivity is 632fF/° when the applied voltage is 0.625 V. The peak-to-peak output signal drift is limited to 1 fF in 2 h. Good linearity was achieved in the range of ±1°. High-precision detection at 0.001° which corresponds to micro-g acceleration, was also demonstrated.

    Original languageEnglish
    JournalJapanese Journal of Applied Physics
    Volume48
    Issue number6 PART 2
    DOIs
    Publication statusPublished - 2009 Jun

    Fingerprint

    Quartz
    quartz
    sensors
    Sensors
    Anisotropic etching
    Capacitive sensors
    Wet etching
    wafers
    Digital circuits
    Micromachining
    Mountings
    digital electronics
    Soldering alloys
    Aspect ratio
    mounting
    micromachining
    solders
    high aspect ratio
    Capacitance
    linearity

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

    Cite this

    Development of highly integrated quartz micro-electro-mechanical system tilt sensor. / Liang, Jinxing; Kohsaka, Fusao; Matsuo, Takahiro; Li, Xuefeng; Kunitomo, Ken; Ueda, Toshitsugu.

    In: Japanese Journal of Applied Physics, Vol. 48, No. 6 PART 2, 06.2009.

    Research output: Contribution to journalArticle

    Liang, Jinxing ; Kohsaka, Fusao ; Matsuo, Takahiro ; Li, Xuefeng ; Kunitomo, Ken ; Ueda, Toshitsugu. / Development of highly integrated quartz micro-electro-mechanical system tilt sensor. In: Japanese Journal of Applied Physics. 2009 ; Vol. 48, No. 6 PART 2.
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