Development of local and real-time concentration measuring method for ozone gas

Yosuke Sato, Tetsuya Nishiguchi, Hidehiko Nonaka, Shingo Ichimura, Yoshimasa Nihei

Research output: Contribution to journalArticle

Abstract

A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.

Original languageEnglish
Pages (from-to)378-381
Number of pages4
JournalShinku/Journal of the Vacuum Society of Japan
Volume48
Issue number6
DOIs
Publication statusPublished - 2005 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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