Abstract
A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.
| Original language | English |
|---|---|
| Pages (from-to) | 378-381 |
| Number of pages | 4 |
| Journal | Shinku/Journal of the Vacuum Society of Japan |
| Volume | 48 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2005 Jan 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
Cite this
Development of local and real-time concentration measuring method for ozone gas. / Sato, Yosuke; Nishiguchi, Tetsuya; Nonaka, Hidehiko; Ichimura, Shingo; Nihei, Yoshimasa.
In: Shinku/Journal of the Vacuum Society of Japan, Vol. 48, No. 6, 01.01.2005, p. 378-381.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Development of local and real-time concentration measuring method for ozone gas
AU - Sato, Yosuke
AU - Nishiguchi, Tetsuya
AU - Nonaka, Hidehiko
AU - Ichimura, Shingo
AU - Nihei, Yoshimasa
PY - 2005/1/1
Y1 - 2005/1/1
N2 - A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.
AB - A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.
UR - http://www.scopus.com/inward/record.url?scp=24644510741&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=24644510741&partnerID=8YFLogxK
U2 - 10.3131/jvsj.48.378
DO - 10.3131/jvsj.48.378
M3 - Article
AN - SCOPUS:24644510741
VL - 48
SP - 378
EP - 381
JO - Journal of the Vacuum Society of Japan
JF - Journal of the Vacuum Society of Japan
SN - 1882-2398
IS - 6
ER -