Development of local and real-time concentration measuring method for ozone gas

Yosuke Sato; Tetsuya Nishiguchi; Hidehiko Nonaka; Shingo Ichimura; Yoshimasa Nihei

doi:10.3131/jvsj.48.378

Development of local and real-time concentration measuring method for ozone gas

Yosuke Sato, Tetsuya Nishiguchi, Hidehiko Nonaka, Shingo Ichimura, Yoshimasa Nihei

Research output: Contribution to journal › Article › peer-review

Abstract

A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.

Original language	English
Pages (from-to)	378-381
Number of pages	4
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	48
Issue number	6
DOIs	https://doi.org/10.3131/jvsj.48.378
Publication status	Published - 2005
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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abstract = "A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.",

author = "Yosuke Sato and Tetsuya Nishiguchi and Hidehiko Nonaka and Shingo Ichimura and Yoshimasa Nihei",

year = "2005",

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journal = "Shinku/Journal of the Vacuum Society of Japan",

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AU - Sato, Yosuke

AU - Nishiguchi, Tetsuya

AU - Nonaka, Hidehiko

AU - Ichimura, Shingo

AU - Nihei, Yoshimasa

PY - 2005

Y1 - 2005

N2 - A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.

AB - A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.

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