Development of local and real-time concentration measuring method for ozone gas

Yosuke Sato, Tetsuya Nishiguchi, Hidehiko Nonaka, Shingo Ichimura, Yoshimasa Nihei

Research output: Contribution to journalArticle

Abstract

A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.

Original languageEnglish
Pages (from-to)378-381
Number of pages4
JournalShinku/Journal of the Vacuum Society of Japan
Volume48
Issue number6
DOIs
Publication statusPublished - 2005 Jan 1
Externally publishedYes

Fingerprint

Ozone
ozone
Gases
gases
Thermal desorption spectroscopy
Sampling
sampling
Exhaust gases
exhaust gases
Spectroscopy
mass spectroscopy
Oxidation
quadrupoles
chambers
desorption
oxidation
estimates
spectroscopy
Temperature

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Development of local and real-time concentration measuring method for ozone gas. / Sato, Yosuke; Nishiguchi, Tetsuya; Nonaka, Hidehiko; Ichimura, Shingo; Nihei, Yoshimasa.

In: Shinku/Journal of the Vacuum Society of Japan, Vol. 48, No. 6, 01.01.2005, p. 378-381.

Research output: Contribution to journalArticle

Sato, Yosuke ; Nishiguchi, Tetsuya ; Nonaka, Hidehiko ; Ichimura, Shingo ; Nihei, Yoshimasa. / Development of local and real-time concentration measuring method for ozone gas. In: Shinku/Journal of the Vacuum Society of Japan. 2005 ; Vol. 48, No. 6. pp. 378-381.
@article{5650867d054b48f6a2324227da9f2763,
title = "Development of local and real-time concentration measuring method for ozone gas",
abstract = "A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23{\%} and 40{\%}.",
author = "Yosuke Sato and Tetsuya Nishiguchi and Hidehiko Nonaka and Shingo Ichimura and Yoshimasa Nihei",
year = "2005",
month = "1",
day = "1",
doi = "10.3131/jvsj.48.378",
language = "English",
volume = "48",
pages = "378--381",
journal = "Journal of the Vacuum Society of Japan",
issn = "1882-2398",
publisher = "Vacuum Society of Japan",
number = "6",

}

TY - JOUR

T1 - Development of local and real-time concentration measuring method for ozone gas

AU - Sato, Yosuke

AU - Nishiguchi, Tetsuya

AU - Nonaka, Hidehiko

AU - Ichimura, Shingo

AU - Nihei, Yoshimasa

PY - 2005/1/1

Y1 - 2005/1/1

N2 - A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.

AB - A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.

UR - http://www.scopus.com/inward/record.url?scp=24644510741&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=24644510741&partnerID=8YFLogxK

U2 - 10.3131/jvsj.48.378

DO - 10.3131/jvsj.48.378

M3 - Article

AN - SCOPUS:24644510741

VL - 48

SP - 378

EP - 381

JO - Journal of the Vacuum Society of Japan

JF - Journal of the Vacuum Society of Japan

SN - 1882-2398

IS - 6

ER -