Development of low-cost mass production process of superrepellent surface using doubly reentrant structure pillar array

Kanki Nakanishi, Shigeyuki Minoshiro, Donghyun Yoon, Tetsushi Sekiguchi, Shuichi Shoji

Research output: Contribution to journalArticle

Abstract

A new fabrication process of a superrepellent surface using a doubly reentrant structure pillar array was developed. The proposed process applying a soft-lithography is simple, low-cost, and mass-productive process compared to the conventional process. It enables to fabricate a doubly reentrant structure pillar array on glass, silicon, and PDMS substrates.

Original languageEnglish
Pages (from-to)165-168
Number of pages4
JournalIEEJ Transactions on Sensors and Micromachines
Volume137
Issue number6
DOIs
Publication statusPublished - 2017

Fingerprint

Lithography
Fabrication
Glass
Silicon
Substrates
Costs

Keywords

  • Contact angle measurement
  • Doubly reentrant structure
  • Mold
  • PDMS
  • Superrepellent surface
  • Surface tension

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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AU - Shoji, Shuichi

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KW - Surface tension

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