@article{83b5a3fc71634725aba3187e32f14d31,
title = "Development of microfabrication process of mesoporous Pt via {"}Solvent-Evaporation-Mediated Direct Physical Casting{"}: Selective deposition into sloped microchannels",
abstract = "We have developed an excellent process for selective deposition of mesoporous Pt through tailored microfabrication steps via the {"}Solvent-Evaporation-mediated Direct Physical Casting (SEDPC){"} method. The direct observation by high-resolution scanning microscopy (HR-SEM) shows the formation of an ordered mesoporous structure in a very confined area. The cyclic voltammogram of the mesoporous Pt reveals a typical feature of Pt surface. The surface morphology and ordering of the mesostructure strongly depend on the electrodeposition conditions (constant-current and constant-potential depositions). The roughness factors are greatly enhanced as the charge densities in the constant-current deposition are increased. These findings are important for the morphological design of mesoporous metals in a micrometer scale.",
keywords = "Electrocatalyst, Electrodeposition, Electroplating, Lithography, Lyotropic liquid crystal, Mesoporous material, Mesoporous metal, Microchannel, Microfabrication, Platinum",
author = "Yusuke Yamauchi and Hiroki Kitoh and Toshiyuki Momma and Tetsuya Osaka and Kazuyuki Kuroda",
note = "Funding Information: The authors greatly appreciate the reviewers{\textquoteright} critical comments and corrections. The authors are deeply grateful to Prof. S. Shoji (Department of Electrical Engineering and Bioscience, Waseda University) for helpful comments on a fluid injection system. We would like to thank Dr. S. Motokawa, Mr. M. Sawada, Mr. R. Sebata (Waseda University) for technical supports and discussion on the electrochemical plating and Dr. J. Mizuno (Nanotechnology Laboratory, Waseda University) for suggestions on the fabrication of patterned channels and Prof. Y. Honda (Waseda University) for HR-SEM observation. This work was supported in part by a Grant-in-Aid for Center of Excellence (COE) Research “Molecular Nano-Engineering”, the 21st Century COE Program “Practical Nano-Chemistry”, and Encouraging Development Strategic Research Centers Program “Establishment of Consolidated Research Institute for Advanced Science and Medical Care” from the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japanese government. This work is also supported by A3 Foresight Program “Synthesis and Structural Resolution of Novel Mesoporous Materials” from Japan Society for the Promotion of Science (JSPS). One of the present authors (Y.Y.) is grateful for financial supports via a Grant-in Aid for JSPS Fellows from MEXT.",
year = "2006",
month = jul,
doi = "10.1016/j.stam.2006.05.004",
language = "English",
volume = "7",
pages = "438--445",
journal = "Science and Technology of Advanced Materials",
issn = "1468-6996",
publisher = "IOP Publishing Ltd.",
number = "5",
}